Integration of Fabrication Technology for Micromechatronics

微机电一体化制造技术

• 批准号: 07044122
• 负责人: MASUZAWA Takahisa
• 金额: $ 7.42万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for international Scientific Research
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07044122/
• 关键词: micromachine; fine machining; optical system; atomic force microscope; semiconductor process; electropolishing; mill wave; plastic deformation of Si; micromachining

The research project aims at the integration of micromachining technologies to fabricate micromechatronic systems ; these systems are composed of microstructures, actuators, electronic circuits, sensors and optical devices. Because the process technologies for these elements differ each other, it is difficult to apply them all together to built a mcirosystem.We have selected three target systems : (1) Micro optical systems, (2) scanning probe microscopes, and (3) Scanner for mili-wave anttena. Design, fabrication processes and testing of the systems were carried out.(1) As for micro optical systems, an optical aligner based on a microactuated stage was designed. The stage should have three dimensional (3-D) shapes to enable multi-degree-of-freedom alignment. We have developed a new technology to self-assemble 3-D microstructures made of polysilicon films. Surface micromachined thin films, i.e.flat microstructures, were elastically deformed into 3-D shapes by the force of microactuators … More . The deformation was fixed by annealing structures with Joule heating. No manual manipulation of structures was needed in the process.(2) As for scanning probe microscopes, an atomic force microscope (AFM) using a very small vibrational probe, called nano-cantilever, was designed. Due to the small mass of the cantilever and the associated high vibrational frequency, it is expected to have extra high sensitivity. The tip of the cantilever was electrochemically etched in a thin film of electrolite. We succeeded to apply the probe in the AFM.(3) The scanner for mili-wave antena was composed of a tortional stage with the antenna on top, a triangular support with electrostatic driving electrodes and a mili-wave oscillator. The anntena was patterned using thin-film technology. The stage and the support were bulk-micromachined from a fused-quartz substrate and a silicon substrate, respectively. The oscillator was made by the compound semiconductor technology, At the last process, all of them are assembled together. We confirmed the motion of scanner by electrostatic actuation and also the mili-wave emission from the antenna. Thus we demostrated the feasibility of the combined usage of different micromachining processes. Less

本研究项目旨在整合微加工技术制造微机电一体化系统；这些系统由微结构、执行器、电子电路、传感器和光学器件组成。由于这些元素的工艺技术各不相同，因此很难将它们一起应用于构建一个微系统。我们选择了三个目标系统：(1)微光学系统，(2)扫描探针显微镜，(3)毫米波天线扫描仪。进行了系统的设计、制造过程和测试。(1)在微光系统方面，设计了一种基于微动平台的光学对准器。舞台应该具有三维（3-D）形状，以实现多自由度对齐。我们已经开发了一种新技术，可以自组装由多晶硅薄膜制成的三维微结构。表面微加工薄膜，即平面微结构，在微致动器的作用下弹性变形成三维形状。通过焦耳加热退火结构来固定变形。在这个过程中不需要手工操作结构。(2)在扫描探针显微镜方面，设计了一种原子力显微镜（AFM），该显微镜使用一种非常小的振动探针，称为纳米悬臂。由于悬臂梁的质量小，振动频率高，因此期望具有超高的灵敏度。悬臂的尖端被电化学地蚀刻在一层薄膜上。我们成功地将探针应用于原子力显微镜。(3)毫波天线扫描器由顶部有天线的扭转台、带静电驱动电极的三角形支架和毫波振荡器组成。该天线采用薄膜技术制作图案化。舞台和支架分别由熔融石英衬底和硅衬底进行批量微加工。该振荡器采用复合半导体技术制作，最后将所有元件组装在一起。我们证实了静电驱动扫描仪的运动和天线发射的毫米波。从而证明了不同微加工工艺组合使用的可行性。少

项目成果

D.Chauvel,N.Haese,P-A Rolland,D.Collard,H.Fujita: "A Micromachined Microwave Antenna Integrated with its Electrostatic Spiral Scanning" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 84-89 (1997)

D.Chauvel、N.Haese、P-A Rolland、D.Collard、H.Fujita：“集成了静电螺旋扫描的微机械微波天线”IEEE 第 10 届微机电系统国际研讨会论文集。

D.Kobayashi,H.Fujita: "Control of a Micro Tunneling Unit Under Atomic Force Proceedings of the 1995 IEEE/RSJ International Conference on" Intelligent Robots and Systems. vol.2. 218-223 (1995)

D.Kobayashi、H.Fujita：“原子力下微型隧道单元的控制”1995 年 IEEE/RSJ 国际会议“智能机器人和系统”论文集。

藤田博之: "自律分散をめざすロボットシステム" マイクロマシンの世界, 23 (1995)

Hiroyuki Fujita：“旨在自主分散的机器人系统”World of Micromachines，23 (1995)

Y.Fukuta,D.Collard T.Akiyama,E.H.Yang H.Fujita: "Microactuated Self-Assembling of 3D Polysilicon Structures with Reshaping Technology" Proceedings IEEE the 10th Annual International Workshop on Micro Electro Mechanical Systems. 477-481 (1997)

Y.Fukuta、D.Collard T.Akiyama、E.H.Yang H.Fujita：“采用重塑技术的 3D 多晶硅结构的微驱动自组装”论文集 IEEE 第 10 届微机电系统国际研讨会。

ドミニック・コラール,ミシェル・ド・ラバシェルリ-,ムサ・ウマディー,ハネス・プロイレル,藤田博之,平本俊郎,橋本英樹,川勝英樹,増沢隆久: "フランス科学技術庁(CNRS)と東京大学生産技術研究所(IIS)のマイクロメカトロニクスに関する共同研究" 生産研究. vol.47 No.5. 244-249 (1995)

Dominique Collard、Michel de Labacherly、Moussa Oumadi、Hannes Proulel、Hiroyuki Fujita、Toshiro Hiramoto、Hideki Hashimoto、Hideki Kawakatsu、Takahisa Masuzawa：“法国国家科学技术局 (CNRS) 和东京大学工业科学研究所(IIS) 微机电一体化联合研究”生产研究。第 47 卷第 5 期。244-249 (1995)