Development of an Evaluation System for Three-Dimensional Surface Asperity on Precision Cylindrical Parts

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This research is a development of an evaluation system for three-dimensional surface asperity on cylindrical surface. The system can measure from form error to waviness or roughness continuously. The equipment is designed to be able to measure cylindrical specimen size from 2 to 100mm in diameter and measuring length is 100mm in axial direction.The equipment consists of aero-static rolling bearing and aero-static sliding bearing. Then we can get surface form deviation in cylindrical coordinate precisely. This system is controled automatically by micro-computer. An accuracy of this system is less than 0.1mum over all of measuring range. Moreover the systematic error of this equipment is detected by reversal method and multi-step method, then these minute remained error, error vector, is able to eliminate from measured data by software.Roller used for rolling bearing is measured by this system. Firstly a total cylindrical form error is measured. Secondly partial areal surface form is measured finely. Thirdly more detailed area is measured more minute measuring condition, and so on. By this procedure, we can find out the cylinder form as if the landscape of an ant view. This procedure is repeatable in any condition that operator want. The advantage is that all of these measured data is able to relate each other. Then for example local areal data can be regressed by cylindrical macro axis.As a results, this system can get any sized surface form in nm order over 100mm specimen size, so temperaturcondition is strictly tight. Then this system must be setted in temperature controled condition or a development of new sensor that can be used in high speed measurement and has precision accuracy.