Development of an Evaluation System for Three-Dimensional Surface Asperity on Precision Cylindrical Parts

本研究是对圆柱表面三维表面粗糙度评定系统的开发。该系统可实现从形状误差到波度或粗糙度的连续测量。该装置由气动静压滚动轴承和气动静压滑动轴承组成，可测量直径为2~100 mm的圆柱形试件，轴向测量长度为100 mm。这样我们就可以在圆柱坐标下精确地求出曲面的形状偏差。该系统由微型机自动控制。该系统在所有测量范围内的精度均小于0.1微米。采用反转法和多步法对该设备的系统误差进行检测，然后通过软件从测量数据中剔除这些微小的残留误差--误差向量。首先测量了总的圆柱形误差。其次，对局部面形进行精细测量。第三，更详细的面积测量，更精细的测量条件，等等。通过这个程序，我们可以找出圆柱体的形状，就像是蚂蚁的风景一样。此过程可在操作员希望的任何条件下重复。优势在于，所有这些测量数据都能够相互关联。然后以局部面状数据为例，用柱面宏观轴线进行回归，结果表明，该系统可以得到100 mm以上样品尺寸的任意纳米量级的表面形态，因此温度条件严格。然后，该系统必须设置在温度控制的条件下，或者开发能够用于高速测量且具有高精度的新型传感器。

This research is a development of an evaluation system for three-dimensional surface asperity on cylindrical surface. The system can measure from form error to waviness or roughness continuously. The equipment is designed to be able to measure cylindrical specimen size from 2 to 100mm in diameter and measuring length is 100mm in axial direction.The equipment consists of aero-static rolling bearing and aero-static sliding bearing. Then we can get surface form deviation in cylindrical coordinate precisely. This system is controled automatically by micro-computer. An accuracy of this system is less than 0.1mum over all of measuring range. Moreover the systematic error of this equipment is detected by reversal method and multi-step method, then these minute remained error, error vector, is able to eliminate from measured data by software.Roller used for rolling bearing is measured by this system. Firstly a total cylindrical form error is measured. Secondly partial areal surface form is measured finely. Thirdly more detailed area is measured more minute measuring condition, and so on. By this procedure, we can find out the cylinder form as if the landscape of an ant view. This procedure is repeatable in any condition that operator want. The advantage is that all of these measured data is able to relate each other. Then for example local areal data can be regressed by cylindrical macro axis.As a results, this system can get any sized surface form in nm order over 100mm specimen size, so temperaturcondition is strictly tight. Then this system must be setted in temperature controled condition or a development of new sensor that can be used in high speed measurement and has precision accuracy.