A Basic Research about a Multi-Scale Evaluation of Surface Form Measurement

本研究旨在提出曲面形状的多尺度计算公式，并实际开发多尺度测量系统。作者开发了一个宽范围的测量系统，包括一个高分辨率的显微镜和它的拼接系统。首先通过相对于显微镜在x、y方向上水平移动工件来完成拼接，然后通过计算叠加指数和计算机优化方法，在6个轴的移动和旋转中重新定位所获得的数据。本研究的结果是：(1)叠加精度是根据重叠面积比和是否利用实验额外数据建立的；(2)精确连接可以在20 × 20个火焰上完成。然后着重计算了局部峰顶参数、峰顶高度分布、局部山丘的体积和表面积、切割剖面的横截面积和周围长度及其分布的多尺度特征。该方法具有一定的可扩展性和一致性。最后，对这些海量的多尺度数据提出了一种新的文件结构，方便了任意尺度、任意分辨率的面数据的读取和重构。这种结构对CRT或打印机显示表面形式很有用。在某些情况下，这种方法可以压缩数据大小而不会丢失。

This research aims to propose a multi-scale formula of surface forms and to develop a multi-scale measuring system actually. The authors developed a wide-range measurement system that consists of a high-resolution microscope and of its stitching system. The stitching is done firstly by moving a work horizontally in x, y directions relatively against the microscope, secondly by relocating the obtained data to each other in 6 axes shifting and rotating with calculating the overlaying index and an optimization method by computer.The results of this research are (1) the overlaying accuracy is established against a overlapped area ratio and whether utilizing additional data or not experimentally, and (2) the precise connection can be done over 20 x 20 flames.Then multi-scale feature is calculated especially in local summit parameters, the summit height distribution, the volume and the surface area of local hill, the cross-sectional area and the surrounding length of the cut profile and the distribution of those parameters. There are some multi-scalability and some uniformity in the parameters.Finally, a new file structure of these huge amount multi-scale data is proposed so that the read out and re-construction an areal data in any scale and in any resolution are convenient. This structure is useful for showing the surface form by CRT or printer. This method can be expected to compress data size without missing in some cases.