High-performance measuring station in functional context for high-performance data converters

乌尔姆大学微电子研究所因其高性能模数转换器（ADC）的研究而享誉全球。高性能是在带宽和采样率、分辨率、线性度和功率效率的背景下被理解的，在ADC社区中，这通常用优点图（FOM）来概括。通过研究所的研究工作，实现了高达20bit的分辨率，GS/s范围内的采样率，> - 180dB范围内的FOM和远高于100dB的内在，无需校准的线性度。研究结果在各种现代工艺（180nm XFAB, 28nm TSMC, 22nm GF）中进行了原型实现和测量。对于这个性能范围内的测量，许多测量仪器都达到了其能力的极限，这就是为什么在功能上下文的协调配置中需要高性能测量站的原因。这包括:-利用高采样率和主动采样的示波器进行宽带模拟信号记录，-混合信号示波器用于并行调试大量模拟和数字（测试）信号，-具有极低相位噪声的宽带信号发生器用于时钟生成，-具有可变外部滤波的宽带信号发生器用于实现高输入信号质量、低噪声和最高线性度。-窄带信号发生器，实现最高的输入信号质量，噪声和线性度<- 120dbfs -低噪声直流源，带线滤波器，用于电源和参考源的产生。以前在微电子研究所使用的测量站已经过时，不再适合计划的研究工作。提交的大型设备申请旨在使微电子研究所继续成为世界领先的高性能数据转换器研究机构之一。

The Institute for Microelectronics at the University of Ulm is recognized worldwide for its research into high-performance analog-to-digital converters (ADC). High performance is understood in the context of bandwidth and sampling rates, resolution, linearity and power efficiency, which is often summarized in a Figure of Merit (FOM) in the ADC community. Resolutions up to 20bit, sampling rates in the GS/s range, FOM in the range of >180dB and intrinsic, calibration-free linearities far above 100dB are achieved by research work at the institute. Research results are prototypically realized and measured in a variety of modern processes (180nm XFAB, 28nm TSMC, 22nm GF). For measurements in this performance range, many measurement instruments come to the edge of their capabilities, which is why a high-performance measurement station is necessary in a coordinated configuration of a functional context. This includes: - broadband analog signal recording by means of oscilloscope with high sampling rate and active samples, - mixed-signal oscilloscope for parallel debugging of a large number of analog and digital (test) signals, - broadband signal generator with very low phase noise for clock generation, - broadband signal generators with variable external filtering for realization of a high high input signal quality with low noise and highest linearity, - narrowband signal generator for realization of highest input signal quality with noise and linearity <-120dBFS - low-noise DC sources with line filter for supply and reference generation. The measuring station previously used at the Institute of Microelectronics is obsolete and no longer suitable for planned research work. The submitted large-scale equipment application is intended to enable the Institute of Microelectronics to continue to be one of the world's leading research facilities for high-performance data converters.