Development of an in-process inner diameter and roundness measuring instrument

在线内径和圆度测量仪的开发

• 批准号: 08555037
• 负责人: ONIKURA Hiromichi
• 金额: $ 1.79万
• 依托单位: KYUSHU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08555037/
• 关键词: Leaser diode; Optical trigonometry; Optical dispersion; Inner diameter measuring instrument; Photo sensitive detector; Surface roughness; Intensity distribution of reflective beam; 三角測量法

The present research finally intends to develop an in-process inner diameter and roundness measuring instrument, based on trigonometry.In the fundamental experiment, where 1-D photo sensitive detector (PSD) receives direct laser beam from a laser diode, the effects of beam intensity and radiated position on the PSD output, detected position error and standard deviation in repetitive measurement are investigated. The results indicate that minimum standard deviation can be obtained when the total output voltage v_1+v_2 of PSD takes a certain range of values and that linear relationship between incident beam position and output position spreads when the inverse voltage v_R to PSD increases. On the hole wall having considerably small roughness also, the measurement may be possible by controlling laser intensity so that the total PSD output may be maintained almost optimal.Using a dispersion-type inner diameter measuring instrument manufactured for trial and standard pieces of surface roughness as measured object, the relationship between the surface roughness of measured object and the intensity and distribution of reflective beam is made clear. The results show that the increase of surface roughness leads to the increase of width of intensity distribution and that the distribution form of intensity changes depending upon the orientation of machining.From the above mentioned, this method gives a promise to apply to the measured objects of considerably wide surface roughness.

在一维光敏探测器(PSD)接收来自激光二极管的直接激光的基础实验中，研究了光强和辐射位置对PSD输出、重复测量的位置误差和标准差的影响。结果表明，当PSD的总输出电压v_1+v_2取一定范围时，可获得最小的标准偏差，入射光束位置与输出位置的线性关系随着反向电压v_R对PSD的增大而扩展。在粗糙度也较小的孔壁上，通过控制激光强度，使PSD总输出几乎保持在最佳状态，即可进行测量。以试制的色散式内径测量仪和标准件表面粗糙度为测量对象，明确了被测物体表面粗糙度与反射光束强度和分布的关系。结果表明，表面粗糙度的增加会导致光强分布宽度的增加，光强分布形式随加工方向的不同而变化，说明该方法适用于表面粗糙度较大的被测对象。