Synthesis of Magneto-optical Films with artificial Structure Using Reactive Altemating Sputtering Technique

(1)纯Bi_3Fe_5O_2薄膜的非外延生长<12>纯铋铁合金（BIG）是一种具有巨法拉第效应的软磁材料。多晶BIG（p-BIG）材料在磁光和微波应用方面具有重要的应用前景。BIG是一种亚稳相，它只能通过在具有以下结构的衬底上从气相直接外延生长而成膜。p-BIG可以在500 ℃下生长在石英玻璃（a-SiO_2）上结晶的多晶Y_3Fe_5O_<12>（p-YIG）或Gd_3Ga_5O_<12>（p-GGG）层上。这意味着YIG（或GGG）和p-BIG的溅射过程必须通过在空气中进行热处理来中断。我们发现，在500 ℃下，用GGG和BIG靶，用交替反应离子束溅射（ARIBS）方法可以获得（Bi，Gd）_3（Fe，Ga）_5）_1_2（p-BGIGG）多晶薄膜，薄膜平整、致密。可见光透过率 ...更多信息 轻，晶格常数为12.548 _，是p-BIG生长的衬底层。我们成功地在p-BGIGG层上生长了p-BIG膜，即这两层是使用ARIBS方法在同一设备中连续沉积的。(2)采用ARIBS技术在外延生长的BIG薄膜中掺杂Co离子，并在此基础上制备了以BIG为主要成分的复合薄膜。用CoO、Co-Fe_2 O_4和金属Co作Co源，薄膜的磁化强度、矫顽力、633 nm和1.5 μ m处的光吸收和1.5 μ m处的法拉第旋光度都有明显的提高，但薄膜的磁性能与Co源无明显关系。在少量Co掺杂的薄膜中，观察到了反向的法拉第磁势环。这一现象可以从Co_<3-x>Fe_xO_4尖晶石颗粒镶嵌在近红外区透明的软磁薄膜BIG中的复合薄膜结构来理解。少

(1) Non-epitaxial growth of pure Bi_3Fe_5O_<12> filmPure Bismuth Iron Gamet (BIG) is a magnetically soft material which shows giant Faraday effect. Poly- crystalline BIG (p-BIG) is an attractive material from the view points of magneto-optical or microwave application. BIG is a metastable phase which is only obtainable in a film state by direct epitaxial growth from the vapor phase onto a substratewith the structure The p-BIG can be gown at 500ﾟC the layer of polyaystalline Y_3Fe_5O_<12> (p-YIG) or Gd_3Ga_5O_<12> (p-GGG) which are crystallized on a quartz glass (a-SiO_2) substrate by heating in air at the respective temp eratures 800 and 1000ﾟC.This means the sputtering processes for YIG (or GGG) and p-BIG must be interrupted by a heat treatment in air. We found that poly cry stalline (Bi, Gd)3 (Fe, Ga) 5)12 (p-BGIGG) can be gown by alternating reactive ion beam sputtering (ARIBS) using GGG and BIG targets at 500ﾟC.The p-BGIGG layer was nonmagnetic and good. transmittance for visible l … More ight and had large lattice constant of 12.548 _, which are much favor able characteristicsas the substrate layer for p-BIG growth. We succeeded in p-BIG film growth on p-BGIGG layer, that is, those two layers were successively deposited in the same apparatus using ARIBS method.(2) Synthesis of composite film inducing BIG as the main component using ARIBS technique ionUsing ARIBS technique, Co ion was doped in epitaxially growing BIG film. As the Co source, CoO, Co Fe2O4, and Co metal were employed No remarkable dependence of the film characteristics on the Co sou rce were found. The intense onhancement of magnetization, coercivity, optical absorption at 633 nm and I.5mum, and Faraday rotation at 1.5 mum was observed. In slightly Co-doped film, inverted Faraday hy steres is loop was observed. Those phenomena can be understood considering the compositefilm structure in whic h fine partides of magnetically hard Co_<3-x>Fe_xO_4 spinel are embedded in ep itaxially gown BIG which is m agnetically soft and tranparent in near infrared region. Less