Synthesis of Magneto-optical Films with artificial Structure Using Reactive Altemating Sputtering Technique

采用反应交替溅射技术合成人工结构磁光薄膜

• 批准号: 08650377
• 负责人: OKUDA Takashi
• 金额: $ 1.41万
• 依托单位: Nagoya Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08650377/
• 关键词: alternating reactive ion beam sputtering; bismuth iron gamet; polycrystalline bismuth iron gamet; polycrystalline gadrinium galliumgamet; composite film; cobalt ferrite; interface exchange coupling; Faraday hysteresis loop; 反応性イオンビームスパッタ法; 熱処理結晶化

(1) Non-epitaxial growth of pure Bi_3Fe_5O_<12> filmPure Bismuth Iron Gamet (BIG) is a magnetically soft material which shows giant Faraday effect. Poly- crystalline BIG (p-BIG) is an attractive material from the view points of magneto-optical or microwave application. BIG is a metastable phase which is only obtainable in a film state by direct epitaxial growth from the vapor phase onto a substratewith the structure The p-BIG can be gown at 500ﾟC the layer of polyaystalline Y_3Fe_5O_<12> (p-YIG) or Gd_3Ga_5O_<12> (p-GGG) which are crystallized on a quartz glass (a-SiO_2) substrate by heating in air at the respective temp eratures 800 and 1000ﾟC.This means the sputtering processes for YIG (or GGG) and p-BIG must be interrupted by a heat treatment in air. We found that poly cry stalline (Bi, Gd)3 (Fe, Ga) 5)12 (p-BGIGG) can be gown by alternating reactive ion beam sputtering (ARIBS) using GGG and BIG targets at 500ﾟC.The p-BGIGG layer was nonmagnetic and good. transmittance for visible l … More ight and had large lattice constant of 12.548 _, which are much favor able characteristicsas the substrate layer for p-BIG growth. We succeeded in p-BIG film growth on p-BGIGG layer, that is, those two layers were successively deposited in the same apparatus using ARIBS method.(2) Synthesis of composite film inducing BIG as the main component using ARIBS technique ionUsing ARIBS technique, Co ion was doped in epitaxially growing BIG film. As the Co source, CoO, Co Fe2O4, and Co metal were employed No remarkable dependence of the film characteristics on the Co sou rce were found. The intense onhancement of magnetization, coercivity, optical absorption at 633 nm and I.5mum, and Faraday rotation at 1.5 mum was observed. In slightly Co-doped film, inverted Faraday hy steres is loop was observed. Those phenomena can be understood considering the compositefilm structure in whic h fine partides of magnetically hard Co_<3-x>Fe_xO_4 spinel are embedded in ep itaxially gown BIG which is m agnetically soft and tranparent in near infrared region. Less

(1)非外延生长的纯Bi_3Fe_5O_(12)薄膜(BIG)是一种具有巨法拉第磁效应的软磁材料。从磁光或微波应用的角度来看，多晶大晶体(p-BIG)是一种很有吸引力的材料。BIG是一种亚稳相，只有在薄膜状态下才能从汽相直接外延生长到衬底上，这种结构的p-BIG可以在500ﾟC覆盖在多层Y_3Fe_5O_(12)或Gd_3Ga_5O_(12)的层上；(P-GGG)是在石英玻璃(a-SiO_2)衬底上分别在800和1000ﾟC的空气中加热结晶而成的。这意味着必须用空气中的热处理来中断YIG(或GGG)和p-BIG的溅射过程。我们发现，在500ﾟC下，用GGG和大靶材交替反应离子束溅射，可以制备出多晶(Bi，Gd)_3(Fe，Ga)_5)12(p-BGIGG)薄膜。可见光L…的透过率较轻且具有较大的晶格常数12.548，这是非常有利于p-Big生长的衬底特性。我们成功地在p-BGIGG层上生长了p-BIG薄膜，即用ARIBS方法在同一设备中连续沉积了这两层。(2)用ARIBS技术合成了以诱导BIG为主要成分的复合膜。采用CoO、Co Fe2O4和Co金属作为钴源，没有发现薄膜的特性与钴源有明显的依赖关系。观察到样品的磁化强度、矫顽力、在633 nm和1.5微米处的光吸收以及1.5微米处的法拉第旋转角都有很大的增强。在少量Co掺杂的薄膜中，观察到了倒置的法拉第杂质环。这些现象可以从复合薄膜结构的角度来理解，在这种复合薄膜结构中，磁性硬的Co_t；3-x&gt；Fe_xO_4尖晶石颗粒镶嵌在EP轴向长袍中，在近红外区是透明的，磁性柔软。较少

项目成果

T.Okuda, A.Kudoh, S.Yoshihar.: "In Situ Growth of Poly cry stalline Bismuth-iron Gamet Films on Quartz Glass Substrate" J.Phys.IV France 7, Colloque C1. Suppl.C1-707-708 (1997)

T.Okuda、A.Kudoh、S.Yoshihar.：“石英玻璃基板上多晶铋铁配子薄膜的原位生长”J.Phys.IV France 7，Colloque C1。

Okuda,Takashi: "Effect of Co-doping on magnetic properties of Bi_3Fe_5O_<12> garnet films" J.Magn.Soc.Jpn.22,No-S1,. 132-134 (1998)

Okuda,Takashi：“共掺杂对 Bi_3Fe_5O_<12> 石榴石薄膜磁性能的影响”J.Magn.Soc.Jpn.22，No-S1，。

Okuda Takashi: "Effect of Co-doping on Magnetic Properties of Bi_3Fe_5O_<12> Gamet Films" J.Magnetics Soc.of Jpn.22, Suppl, No.S1. 132-134 (1998)

奥田隆：“共掺杂对Bi_3Fe_5O_<12>配子膜磁性的影响”J.Magnetics Soc.of Jpn.22，增刊，No.S1。

Okuda,Takashi: "In situ Growth of polycrystalline Bismuth Iron Garnet Films on QuartzGlass Substrate" Journal de Physique,. (accepted).

Okuda，Takashi：“石英玻璃基板上多晶铋铁石榴石薄膜的原位生长”Journal de Physique，。

T.Okuda, N.Adachi, H.Ohsato, Y.Katoh, and T.Mima: "Magnetic and Optical Studies of Structure of Co-Doped BismuthIron-Gamet" J.Phys.IV France 7, Colloque C1. Suppl.C1-711-712 (1997)

T.Okuda、N.Adachi、H.Ohsato、Y.Katoh 和 T.Mima：“共掺杂铋铁配子结构的磁和光学研究”J.Phys.IV France 7，Colloque C1。