Hanging Type Magnetic Suspention Mechanism Using Motion Control of Permanent Magnet

在各个领域，对非常清洁的环境的需求正在增加。在这些区域使用的机器和工具必须是超清洁的，以避免在处理和处理过程中污染样品。与这些系统一起使用的运输车辆也必须不产生污染。无机械接触的磁悬浮车辆是一个彻底的解决方案。提出了一种永磁运动控制的磁悬浮运输系统。这种悬浮机制的原理是磁力由气隙长度控制。磁悬浮车辆系统的结构是将悬浮物体悬挂在上部的铁轨上，并在物体上安装部分磁铁、传感器和执行器。制作了1自由度悬架系统。气隙控制采用压电致动器。实验结果验证了该悬浮系统的可收缩性。并制作了3自由度悬架系统。该系统可以悬浮，但鲁棒性很弱。原因是执行器的运动范围很短，因此三个执行器的调零非常困难，并且经常出现控制输入饱和的情况。作为对策，建立了输入电压的积分反馈回路，并将执行机构静置在中心位置。但并没有明显的改善。为了使系统具有鲁棒性，对几种控制方法进行了研究。并将传送装置安装在悬浮物体上。

The need for a very clean environment is increasing in varous areas. Machines and tools used in such areas must be ultra-clean to avoid sample contamination during handring and processing. The conveyance vehicles used with these systems must alse generate no contamination. The mag-lev vehicle without mechanical contacts is a thoroughly solution. A type of mag-lev conveyance system with permanent magnet motion control is proposed. The principle of this levitation mechnism is that the magnetic force is controlled by the air gap length. The mag-lev vehicle system has the structure that the levitating object hangs on the upper iron rail and parts of magnets, sensors, and actuators are installed on the object. 1 DOF suspention system was made. The peizoelectric actuator is used for the air gap control. The experimental results are verify that the proposed levitation system can be contracted. 3 DOF suspention system was also made. The system can be levitated, but the robustness is very weak. The reason is that the movemnet range of the actuator is very short, so the zero adjustments of three actuators are very difficult, and the saturation of the control input often occurs. As the countermeasure, the integral feedback loop of the input voltage was made and the actuator is always set in the center position statically. But the obvious improvement can not be seen. To make the system robust, some control methods are examined. And the conveyance instruments are installed to the levitated object.