Hanging Type Magnetic Suspention Mechanism Using Motion Control of Permanent Magnet

在各个地区，对非常清洁的环境的需求正在增加。在这些区域使用的机器和工具必须超净，以避免样品在搬运和处理过程中受到污染。与这些系统一起使用的运输车辆也必须不产生污染。无机械接触的磁悬浮列车是一个彻底的解决方案。提出了一种永磁运动控制的磁悬浮运输系统。这种悬浮机构的原理是磁力由气隙长度控制。磁悬浮车辆系统的结构是悬浮物体悬挂在上铁轨道上，磁体、传感器和致动器的部分安装在物体上。制作了1自由度悬挂系统。压电执行器用于气隙控制。实验结果验证了该悬浮系统的可行性。并制作了三自由度悬挂系统。系统可以悬浮，但鲁棒性很弱。其原因是作动器的运动范围很短，因此三个作动器的零点调整非常困难，并且经常出现控制输入的饱和。作为对策，输入电压的积分反馈回路和执行机构总是设置在中心位置静态。但明显的改善看不到。为了使系统的鲁棒性，一些控制方法进行了检查。并且将所述输送器具安装到所述悬浮物体上。

The need for a very clean environment is increasing in varous areas. Machines and tools used in such areas must be ultra-clean to avoid sample contamination during handring and processing. The conveyance vehicles used with these systems must alse generate no contamination. The mag-lev vehicle without mechanical contacts is a thoroughly solution. A type of mag-lev conveyance system with permanent magnet motion control is proposed. The principle of this levitation mechnism is that the magnetic force is controlled by the air gap length. The mag-lev vehicle system has the structure that the levitating object hangs on the upper iron rail and parts of magnets, sensors, and actuators are installed on the object. 1 DOF suspention system was made. The peizoelectric actuator is used for the air gap control. The experimental results are verify that the proposed levitation system can be contracted. 3 DOF suspention system was also made. The system can be levitated, but the robustness is very weak. The reason is that the movemnet range of the actuator is very short, so the zero adjustments of three actuators are very difficult, and the saturation of the control input often occurs. As the countermeasure, the integral feedback loop of the input voltage was made and the actuator is always set in the center position statically. But the obvious improvement can not be seen. To make the system robust, some control methods are examined. And the conveyance instruments are installed to the levitated object.