Analysis for thin film delamination process and inverse analysis system considering a fine microstructure of interface and interfacial energy

考虑界面精细微观结构和界面能的薄膜分层过程分析及反分析系统

• 批准号: 12650075
• 负责人: KOGUCHI Hideo
• 金额: $ 2.3万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650075/
• 关键词: Interface; Interfacial energy; Thin film; Delamination; Boundary element method; Interfacial structure; inverse analysis

In the present study, we pursued to estimate an adhesive force by constructing a model of thin film delamination and considering a microstructure at the interface. The delamination process is similar to the adhesion one from a microscopic view. Hence, we made a program for simulation of a thin film adhesion process using BEM to simulate the delamination process. Molecular force was taken into account in the adhesion process. JKR theory has been compared with the experimental results and demonstrated the validity of algorithm of program. Then, an adhesion between a cylinder and a half-plane was analyzed using the program, the validity of the program was examined by comparing with the results based on JKR theory. A governing equation of displacement and coordinates of node were divided by an equilibrium length of atoms. Consequently, an accuracy and stability of calculation could be kept. The following results were deduced in the investigation1. The validity and utilization of the present study could be shown through a comparison of adhesion radius and the maximum adhesive force deduced in our study with those in other adhesive theory2. An adhesion between a cylinder with an uneven surface and a flat surface was analyzed. When the cylinder with the uneven surface was pressed down to the flat surface, the cylinder adhered to the flat surface keeping the distance of equilibrium length of atoms. It was found that the maximum adhesion force is proportional to the number of uneven of surface through the comparison of the maximum adhesion force, the radius of adhesion region and the surface traction3. A new adhesion theory for nano size domain was presented considering surface stresses and surface energy

在本研究中，我们追求通过构建薄膜分层模型并考虑界面处的微观结构来估计粘附力。从微观上看，脱层过程类似于粘附过程。因此，我们编制了一个程序，用边界元法模拟薄膜的粘附过程，以模拟分层过程。在粘附过程中考虑了分子力的作用。将JKR理论与实验结果进行了比较，验证了程序算法的有效性。利用该程序对圆柱与半平面的粘附问题进行了分析，并与基于JKR理论的结果进行了比较，验证了该程序的有效性。用原子的平衡长度除节点的位移和坐标的控制方程。从而保证了计算的准确性和稳定性。在研究中得出以下结果1.通过与其他粘接理论推导出的粘接半径和最大粘接力的比较，可以看出本研究的有效性和实用性。分析了表面不平的圆柱体与平面之间的粘附。当将表面不平整的圆柱体压向平面时，圆柱体与平面保持原子平衡长度的距离。通过对最大粘附力、粘附区半径和表面张力3的比较，发现最大粘附力与表面凹凸数成正比。提出了一种新的考虑表面应力和表面能的纳米畴粘附理论

项目成果

古口 日出男, 今井 建文: "付着力を考慮した凝着・剥離の境界要素法による解析"日本機械学会北陸信越支部第39期総会・講演会講演論文集. No.027-1. 265-266 (2002)

Hideo Furuguchi、Takefum​​i Imai：“使用考虑粘附力的边界元法分析粘附和分层”日本机械工程师学会北陆信越分会第 39 届会议记录和演讲第 027-1 号。 -266（2002）

古口 日出男, 今井 建文: "境界要素法による界面付着力を考慮した薄膜剥離解析"日本機械学会2001年度年次大会講演論文集. No.02-02. 37-38 (2001)

Hideo Furuguchi、Takefum​​i Imai：“使用边界元法考虑界面粘附的薄膜剥离分析”日本机械工程师学会 2001 年年会论文集第 02-02 号（2001 年）。

古口日出男, 畑田将伸: "付着力を考慮した凝着・剥離の境界要素法による解析"M&M2003材料力学部門講演会. No.03-11. 261-262 (2003)

Hideo Furuguchi、Masanobu Hatada：“考虑粘附力的边界元法分析粘附和分层”M&M2003 材料力学部讲座第 03-11 号（2003 年）。

古口日出男, 畑田将伸: "付着力を考慮した凝着・剥離の境界要素法による解析"第16回計算力学講演会講演論文集. No.03-26. 787-788 (2003)

Hideo Furuguchi、Masanobu Hatada：“使用考虑粘附力的边界元法分析粘附和分离”第 16 届计算力学会议论文集第 787-788 号（2003 年）。

古口 日出男: "表面応力を考慮した接触凝着解析(第一報 Hertz理論との比較)"日本機械学会論文集A編. 70-690. 289-297 (2004)

Hideo Furuguchi：“考虑表面应力的接触附着力分析（第一份报告，与赫兹理论的比较）”日本机械工程师学会汇刊，A 版 70-690（2004 年）。