Study on incandescent microcavity radiator of high luminous efficacy by reduction of infrared radiation

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[1] Using KrF excimer laser, we made a sample of tungsten microcavity radiator that was perforated 640000 cylindrical cavities of diameter 5 μm in 10 μm intervals at central region 8 mm x 8 mm of the quartz glass on which tungsten of thickness 1 μm was deposited. The cutoff wavelength of the cavity of aperture 5 μm is about 9 μm and the temperature of black body at which the radiation of wavelength 9 μm becomes a maximum is about 320 K. Therefore, we measured spectral radiant existances of the sample heated at 300〜700 K. By analyzing measurement results in detail based on a theoretical analysis, we evaluated cutoff characteristics of the sample.[2] Complex index of refraction of the tungsten is necessary for design of the tungsten microcavity radiators and evaluation of their luminous efficacy. Therefore, we constructed an ellipsometer in order to measure the complex index of refraction of the tungsten and verified that this ellipsometer measures the complex index of refraction of the tungsten at a high accuracy.