Studies of high concentration O_3 production using on-off narrow gap barrier discharge and its spatial transfer

开关窄间隙势垒放电高浓度O_3生产及其空间传输研究

• 批准号: 12650273
• 负责人: OHE Kazuyuki
• 金额: $ 2.3万
• 依托单位: Nagoya Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650273/
• 关键词: barrier discharge; atomospheric discharge; ozonizer; on-off modulation; spatial transfer of discharge; ozonizer; barrier discharge; thin gap parallel plate; high density ozone

A conventional cylindrical barrier discharge was used to produce O_3. The discharge tube was 300mm in length and 20mm φ. Thin Al film covered over a glass-made dielectric with 1.0 mm in thiskness was used as the outer electrode. The discharge gap was 0.2 mm, inside of which was the inner electrode made of stainless steel tube. A continuous and on-off modulated power supply, of which frequency was 10 kHz was applied between the two electrode. O_2 gas about 1 atm pressure was fed to the discharge tube with 21min flow rate. For 3 ms on and 100 ms off, the yielding rate of O_3 was improved more than 20% compared with the continuous discharge, where the discharged power was kept at 0.2 W. A spatial transfer discharge system (the so-called relay system) using two discharge tubes above discribed was used to obtain more high O3 yielding rate. Two tubes were installed in parallel within a cylindrical stainless steel vessel. These two tubes were operated with the on-off power supply, while the on-off turning for the tubes was adjusted so as not to overlap each other. As the result, the O_3 yielding rate using the relay system was 2 times larger than that of one tube.

采用传统的圆柱形阻挡放电产生O_3。放电管长300mm，φ 20mm。外电极采用厚度为1.0mm的薄Al膜覆盖在玻璃制成的电介质上。放电间隙为0.2mm，其内部是由不锈钢管制成的内电极。在两个电极之间施加频率为10 kHz的连续开关调制电源。在放电管中通入1atm左右的O_2气体，流量为21min。在3ms开100ms关的条件下，O3产率比放电功率为0.2W的连续放电提高了20%以上。为了获得更高的O_3产率，采用了一种采用上述两个放电管的空间转移放电系统（即所谓的中继系统）。将两个管平行安装在圆柱形不锈钢容器内。这两个电子管用开关电源操作，同时调整电子管的开关转动，以便彼此不重叠。结果表明，接力式系统的产氧率比单管系统的产氧率高2倍。

项目成果

西田正平,木村高志,大江一行: "Gap dependence of ozone production in parallel plate type barrier discharges"Proceed.Plasma Sci.Sym.2001/18th sym.Plasma processing. 687-688 (2001)

Shohei Nishida、Takashi Kimura、Kazuyuki Oe：“平行板型势垒放电中臭氧产生的间隙依赖性”Proceed.Plasma Sci.Sym.2001/18th sym.Plasmaprocessing。