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Investigations related to spatial non uniformly of discharge plasmas

放电等离子体空间不均匀性的相关研究

基本信息

批准号：
10650274
负责人：
OHE Kazuyuki
金额：
$ 1.92万
依托单位：
Nagoya Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650274/
关键词：
EEDF Ar plasma Ar CFィイD24ィエD2 plasma Boltzman equation Spatial variation of plasma Global model Capacitively coupled rf plasma Inductively coupled rf plasma Ar-C_2プラズマ Ne rfプラズマプローブ計測 Ar-O_2プラズマ N_2プラズマボルツマン方程式

项目摘要

In 1999, experimental and theoretical investigations were preformed for rf discharges and their results were published in scientific journal as follows,1. The electron energy distribution (EEDF) was measured using a single probe in an inductively coupled Ar/CFィイD24ィエD2 plasma over the pressure range from 3 to 30 mTorr keeping the input power at 50W. The EEDF is a bi-Maxwellian in the pressure lower than 10 mTorr in spite of varying the mixing ratio of Ar to CfィイD24ィエD2, while the EEDF becomes a Druyvesteyn one with increasing CFィイD24ィエD2 at 30 mTorr.2. The EEDF was measured in a capacitivity coupled Ar plasma over the pressure range from 0.03 to 0.1 Torr keeping the rf current constant at 140 mA by varying the gap length. The EEDF s a bi-Maxwellian in the pressure lower than 0.05 Torr, while it becomes a bi-Maxwellian to a maxwellian and a Druyvesteyn in the pressure higher than 0.07 Torr.These gap dependences of EEDF can be explained by the change of heating mechanism from the stochastic to joule heatings in the high energy region, while by the comparison of the elastic collision frequency and the e-e collision one in the low energy.

1999年，对射频放电进行了实验和理论研究，并在科学杂志上发表了如下结果：1。电子能量分布（EEDF）是使用一个单一的探针在电感耦合的Ar/CF_2D_24等离子体中，在3至30 mTorr的压力范围内，保持输入功率为50 W的测量。在低于10 mTorr的压力下，尽管改变Ar与CF_（24）O_（24）D_2的混合比，EEDF是双麦克斯韦的，而在30 mTorr下，随着CF_（24）O_（24）O_（24）D_2的增加，EEDF变成Druyvesteyn的。EEDF测量在电容耦合Ar等离子体的压力范围从0.03到0.1托保持射频电流恒定在140毫安通过改变差距长度。在低于0.05Torr的气压下，EEDF为双Maxwell型，而在高于0.07Torr的气压下，EEDF变为双Maxwell型、Maxwell型和Druyvesteyn型，这些EEDF的带隙依赖性可以用高能区由随机加热到焦耳加热的转变来解释。而在低能量下，通过弹性碰撞频率与e-e碰撞频率的比较，发现了电子碰撞的能量密度随能量密度的变化规律。