Investigations related to spatial non uniformly of discharge plasmas

in 1999,experimental and theoretical investigations for rf discharges and their results发表在科学期刊作为follows，1. The electron energy distribution (EEDF) was measuredusing a single probe in an inductively coupled Ar/CF D24 D2 plasma over the pressure range from 3to 30mtorr keeping the input power at 50w . the EEDF is a bie - maxwellian in the pressure lower than10 mTorr in spite of varying the mixing ratio of Ar to Cf - D24 - D2，while the EEDF becomes a Druyvesteyn one with increasing CF D24 D2 at 30mtorr .2. the EEDF wasmeasured in a capacitivity coupled Ar plasma over the pressure range from 0.03 to 0.1 Torr keepingthe rf current constant at 140ma by varying the gap length. the EEDF savi - maxwellian in thepressure lower than 0.05 Torr，while it becomes a bie - maxwellian to a maxwellian and a Druyvesteyn in the pressure higher than 0.07Torr.These gap dependences of EEDF can be explained by the change of heating mechanism from thestochastic to joule heatings in the high energy regionwhile by the comparison of the elastic collision frequency and the e-e collision one in the lowenergy。

In 1999, experimental and theoretical investigations were preformed for rf discharges and their results were published in scientific journal as follows,1. The electron energy distribution (EEDF) was measured using a single probe in an inductively coupled Ar/CFィイD24ィエD2 plasma over the pressure range from 3 to 30 mTorr keeping the input power at 50W. The EEDF is a bi-Maxwellian in the pressure lower than 10 mTorr in spite of varying the mixing ratio of Ar to CfィイD24ィエD2, while the EEDF becomes a Druyvesteyn one with increasing CFィイD24ィエD2 at 30 mTorr.2. The EEDF was measured in a capacitivity coupled Ar plasma over the pressure range from 0.03 to 0.1 Torr keeping the rf current constant at 140 mA by varying the gap length. The EEDF s a bi-Maxwellian in the pressure lower than 0.05 Torr, while it becomes a bi-Maxwellian to a maxwellian and a Druyvesteyn in the pressure higher than 0.07 Torr.These gap dependences of EEDF can be explained by the change of heating mechanism from the stochastic to joule heatings in the high energy region, while by the comparison of the elastic collision frequency and the e-e collision one in the low energy.