PROPOSAL OF SIMPLE FABRICATION TECHNIQUE OF NONLINEAR OPTICAL WAVEGUIDE DEVICES BASED ON NANOIMPRINT LITHOGRAPHY

提出并演示了基于纳米压印技术的聚合物薄膜非线性光栅和波导的简单制作方法。采用紫外激光烧蚀单脉冲双光束干涉技术，制备了金属基体和聚酰亚胺模组成的光栅母片，并对其热稳定性和机械稳定性进行了研究。主模电光聚合物在其玻璃化转变温度附近。同时，在聚合物薄膜上施加高压诱发二阶非线性。测量了光栅的轮廓、稳定性和非线性。在此基础上，结合UV光漂白技术，实现了通道波导的制备。该技术的几个优点，在一个高分辨率和简单的方式，使其适用于多种聚合物波导器件的电光调制和频率转换。

Simple fabrication technique of nonlinear gratings and waveguides in polymer films based-on nanoimprint technology was proposed and demonstrated. The grating master consisting of metal base and polyimide die was fabricated by the single pulse two-beam interference technique using UV laser ablation, and its thermal and mechanical stability was investigated. The master molded electrooptic polymers at around their glass transition temperatures. At the same time, high voltage was applied to the polymer films to induce the second-order nonlinearity. The grating profile, stability and the nonlinearity were measured. Moreover, fabrication of channel waveguide was realized based on the present hot-emboss technique combined with UV photobleaching. The several advantages of this technique, in a high resolutional and simple way, make it useful for several polymer waveguide devices for electrooptic modulation and frequency conversion.