SYNTHESIS OF HEAT RESISTANT, TRANSPARENT POLYARYLATE AND APPLICATION TO WAVEGUIDE TYPE DEVICES

耐热透明聚芳酯的合成及其在波导型器件中的应用

• 批准号: 13555013
• 负责人: SUGIHARA Okihiro
• 金额: $ 3.84万
• 依托单位: TOHOKU UNIVERSITY (2003)Shizuoka University (2001-2002)
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555013/
• 关键词: POLYARYLATE; OPTICAL WAVEGUIDE; HEAT RESISTANT; TRANSPARENT; FLUORINATION; ELECTRON BEAM WRITING; THERMAL DEVELOPMENT; 耐熱透明性; 熱現象; 耐熱性ポリアリレート; マルチモード; フッ素化ポリアリレート; リソグラフィ; エッチング

Heat resistant polyarylates with high glass transition temperature (Tg) over 200℃ were newly synthesized. Optical properties and thermal stability were investigated with a series of polyarylates. It indicated that the Ppolyarylates showed high thermal stability as well as high optical transparency in visible and near IR region. Especially one of polyarylates showed very high thermal stability and low birefringence sufficient for optical device fabrication. EB lithography could be applied to the PAR thin films, and high resolution relief gratings on polyarylate were fabricated by direct electron beam writing technique together with thermal development. It was also found that a fluorinated polyarylate showed higher sensitivity for electron beam by 20 times than other polyarylates. Using the fluorinated polyarylate, which reviels higher transparency, multi-mode waveguides with core sizes of 30μm and 90μm were also fabricated by photoithography and reactive ion etching techniques. From their excellent characteristics sufficient for optical waveguide fabrication, the polyarylate films will be promising candidate for photonic device applications, especially for optical interconnection and for optical local area network.

合成了玻璃化转变温度（Tg）大于200℃的耐热聚芳酯.研究了一系列聚芳酯的光学性能和热稳定性。结果表明，该聚芳酯在可见光和近红外波段具有较高的光学透明性和热稳定性。特别是一种聚芳酯显示出非常高的热稳定性和足够用于光学器件制造的低双折射。利用电子束光刻技术在聚芳酯薄膜上制作了高分辨率浮雕光栅。还发现氟化聚芳酯显示出比其它聚芳酯高20倍的电子束灵敏度。利用具有较高透明性的含氟聚芳酯，采用光刻和反应离子刻蚀技术制备了纤芯尺寸分别为30μm和90μm的多模波导。聚芳酯薄膜具有良好的光波导特性，在光子器件，特别是光互连和光局域网方面有着广阔的应用前景。

项目成果

M.Tomiki: "High-Resolution in Heat-Resistant Optical Polymer by Electron-Beam Exposure and Thermal Development"Jpn.J.Appl.Phys.. Vol.42,No.4B. 2538-2540 (2003)

M.Tomiki：“通过电子束曝光和热显影实现耐热光学聚合物的高分辨率”Jpn.J.Appl.Phys.. Vol.42，No.4B。

O.Sugihara: "Development of linear and nonlinear optical polymers and their applications to optical network devices"台湾化学工業部会「光通信デバイス材料の技術研討会」(招待講演). (2001)

O.Sugihara：“线性和非线性光学聚合物的开发及其在光网络器件中的应用”台湾化学工业委员会“光通信器件材料技术研究组”（邀请报告）（2001）。

O.Sugihara: "Polymer optical waveguide fabrication toward low insertion loss (invited)"Proc.SPIE. Vol.5246. 143-150 (2003)

O.Sugihara：“面向低插入损耗的聚合物光波导制造（受邀）”Proc.SPIE。

O.Sugihara: "Polymer optical waveguide fabrication toward low insertion loss"Proc.SPIE. Vol.5246. 143-150 (2003)

O.Sugihara：“聚合物光波导制造实现低插入损耗”Proc.SPIE。

O.Sugihara: "Fabrication Technology of Polymer Optical Waveguide Components"Kogaku. Vol.31, No.2. 100-102 (2002)

O.Sugihara：“聚合物光波导元件的制造技术”Kogaku。