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Measurement of the three-dimensional high frequency micro-magnetic stray fields beyond a magnetic head by electron tomography

电子断层扫描测量磁头外三维高频微磁杂散场

基本信息

批准号：
12650421
负责人：
MATSUDA Jin-ichi
金额：
$ 2.3万
依托单位：
Nagaoka University of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650421/
关键词：
Magnetic head High frequency magnetic stray fields Measurement of 3-DI magnetic field Detection of electron beam position Reflection electron beam Measurement of deflection vector Reconstruction algorithm Electron beam tomography

项目摘要

A new measuring system by reflection electron beam tomography has been developed to measure the stray magnetic fields of a magnetic head with gap length of 1 μm and under. We developed the measuring system to measure the magnetic stray fields of the magnetic head with gap length of 10 μm and over by reflection electron beam tomography, but it is difficult to measure the magnetic fields of a magnetic head for the high density magnetic record.In this study, in order to improve the measurement accuracy of deflection data of electron beams deflected by the objected magnetic fields, a high accurate commercial type PSD (Position Sensing Detector) is introduced and its performance was studied experimentally. First, to improve the S/N ratio of the PSD, the parameter value of the feedback resistance in the current - voltage transform circuit was adjusted. Second, to obtain the good linearity of position detection of the electron beam, the incident current of electron beams onto the PSD is increased by changing the aperture size of the object lens and also increasing the excitation current of the condenser lens of the SEM. Unfortunately, though these modifications were done, the spatial resolute of the PSD was around 25 μm and can not be improved due to the resulting increment of the radius of the electron probe beams by changing the aperture size of the object lens. Finally, the sample stage for holding the magnetic head was modified to improve the reproduced accuracy of the decision of the stage. From these modifications, it is expected to measure the stray magnetic fields of a magnetic head with gap length of 1 μm and under for the high density magnetic record.

研制了一种新的反射式电子束层析成像测量系统，用于测量间隙长度小于1 μm的磁头杂散磁场。针对高密度磁记录磁头磁场测量的困难，研制了用反射式电子束层析成像技术测量10 μm及以上间隙磁头杂散磁场的测量系统，为了提高目标磁场偏转电子束偏转数据的测量精度，介绍了一种高精度的商用PSD（位置传感探测器），并对其性能进行了实验研究。首先，通过调整电流电压变换电路中反馈电阻的参数值来提高PSD的信噪比。第二，为了获得电子束位置检测的良好线性，通过改变物镜透镜的孔径尺寸以及增加SEM的聚光透镜的激励电流来增加电子束到PSD上的入射电流。不幸的是，尽管进行了这些修改，PSD的空间分辨率约为25 μm，并且由于通过改变物镜透镜的孔径尺寸而导致的电子探测束半径的增加而不能得到改善。最后，改进了用于保持磁头的样品台，以提高该样品台的再现精度。通过这些改进，可望测量间隙长度为1 μm及以下的高密度磁记录磁头的杂散磁场。