ULTIMATE LOW THRESHOLD AND LARGE SCALE INTEGRATION OF SEMICONDUCTOR MICRODISK LASERS

半导体微盘激光器的终极低阈值和大规模集成

• 批准号: 13305009
• 负责人: BABA Toshihiko
• 金额: $ 27.71万
• 依托单位: YOKOHAMA NATIONAL UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13305009/
• 关键词: MICRODISK; MICROLASER; SPONTANEOUS EMISSION CONTROL; GAINASP; INP; MICROGEAR; PHOTONIC CRYSTAL; PHOTONIC MOLECULE; PURCELL EFFECT; 半導体レーザ; BCBポリマー; アサーマル

In this study, we investigated the size reduction, threshold reduction, and the realization of the spontaneous emission control such as Purcell effect in microdisk semiconductor lasers, and their high integration and the formation for photonic molecule. First, we achieved the room temperature continuous wave operation of GaInAsP device by photopumping. The smallest diameter of the device was 1.7 microns, which is the same as the smallest record of this device. In addition, the lowest threshold was as low as 19 microns, which is the lowest record for GaInAsP lasers. We also integrated the metal electrode and observed the current injection lasing. In this experiment, an athermal effect in the polyimide cladding layer was discovered, which stabilizes the lasing wavelength. Then, we proposed a microgear cavity having a rotationally symmetric grating along the periphery of the microdisk. We theoretically found that the gear shape essentially improves the cavity Q factor. Actually, we successfully reduced the threshold to 14 microwatts. The spontaneous emission factor of these devices were evaluated to be over 0.1, which is close to the large Purcell factor of 6.7 was 0.1 micros to form a photonic molecule. A unique mode splitting, anti-crossing characteristics, miniband formation and bistable characteristics were observed for the photonic molecule, which are promising for future functional photonic circuits and photonic memories.

本论文主要研究了微盘半导体激光器的尺寸减小、阈值降低、自发辐射控制（如珀塞尔效应）的实现、高集成度以及光子分子的形成等问题。首先，我们利用泵浦技术实现了GaInAsP器件的室温连续波工作。器械的最小直径为1.7微米，与该器械的最小记录相同。此外，最低阈值低至19微米，这是GaInAsP激光器的最低记录。我们还集成了金属电极，并观察到了电流注入激光。在实验中，发现了聚酰亚胺包层中的非热效应，该非热效应稳定了激光波长。然后，我们提出了一种微齿轮腔具有旋转对称的光栅沿着的微盘的周边。我们从理论上发现，齿轮形状本质上提高了腔Q因子。实际上，我们成功地将阈值降低到了14微瓦。这些器件的自发辐射因子被评估为超过0.1，这接近于形成光子分子的大珀塞尔因子6.7。该光子晶体具有独特的模式分裂、抗交叉特性、能带结构和光子晶体特性，有望成为未来的功能性光子电路和光子存储器。

项目成果

K.Aoki, H.T.Miyazaki, H.Hirayama, K.Inoshita, T.Baba, N.Shinya, Y.Aoyagi: "3D photonic crystals fabricated by micromanipulation technique"Applied Physics Letters. 81・17. 3122-3124 (2002)

K.Aoki、H.T.Miyazaki、H.Hirayama、K.Inoshita、T.Baba、N.Shinya、Y.Aoyagi：“通过显微操作技术制造的 3D 光子晶体”应用物理快报 81・17（2002 年）。

T.Baba, N.Fukaya, A.Motegi: "Clear correspondence between theoretical and experimental light propagation characteristics in photonic crystal waveguides"Electronics Letters. 37・12. 761-762 (2001)

T.Baba、N.Fukaya、A.Motegi：“光子晶体波导中的理论和实验光传播特性之间的清晰对应”《电子快报》37・12 (2001)。

T.Fukazawa, T.Hirano, F.Ohno, T.Baba: "Low loss intersection of Si photonic wire waveguides"Japanese Journal of Applied Physics. 43・2. 646-647 (2004)

T.Fukazawa、T.Hirano、F.Ohno、T.Baba：“硅光子线波导的低损耗交叉”日本应用物理学杂志 43・2（2004 年）。

K.Nozaki, T.Baba: "Quasiperiodic photonic crystal microcavity lasers"Applied Physics Letters. 84・24(in press). (2004)

K.Nozaki、T.Baba：“准周期光子晶体微腔激光器”应用物理快报 84・24（出版中）。

野田進, 馬場俊彦, 納富雅也, 小野雄一(分担): "フォトニック結晶研究の現状と将来展望---テクノロジーロードマップを目指して---(改訂版)"光産業技術振興協会. 55 (2003)

Susumu Noda、Toshihiko Baba、Masaya Notomi、Yuichi Ono（撰稿人）：“光子晶体研究的现状和未来展望——迈向技术路线图——（修订版）”光子产业和技术促进协会 55（2003 年）。 ）