Hybrid Thermal Probe and Laser for Direct Writing of Advanced Nano Sensors (HyProLaSens)

用于直接写入高级纳米传感器的混合热探针和激光 (HyProLaSens)

• 批准号: 531412015
• 金额: --
• 依托单位: Technische Universität Chemnitz
• 依托单位国家: 德国
• 项目类别: Major Research Instrumentation
• 财政年份: 2024
• 资助国家: 德国
• 起止时间: 2023-12-31 至 无数据
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/531412015?language=en
• 关键词: Hybrid; Thermal; Probe; Laser; Direct

For the realization of high-performance, reproducible, stable multifunctional sensors going significantly beyond the state of the art, necessary tools, and equipment for fabrication and in-situ characterization at the nanoscale are of particularly importance. Common structuring tools in the macro- and microscale range are not satisfying the needed miniaturization and do not realize a high resolution. This restricts the sensor performance in terms of sensitivity and accuracy and narrows the research capabilities and the research transfer perspectives. In addition, modifications and tweaking of the surfaces at sub nanoscale are also one of the requirements in the development of sensors with added functionalities and enhance the range of applications of the sensors. The requested device enables non-invasive nano processing and precise structuring of nano devices by thermal scanning probe lithography and laser direct writing on a multitude of materials and provides in-situ imaging capabilities. A functionalization with nanoscale resolution can be thereby realized with molecules and biomolecule conjugations with a highly localized resolution of a few nanometres. Particularly, chemical sensors can be thereby significantly miniaturized and reach a low limit of detection in the femtomolar range to fulfill the requirements of critical applications, e. g. in health care and safety applications. Highly miniaturized sensor arrays can be realized with highly sensitive sensors that can be implemented in non-invasive applications such as wearables for monitoring of sweat, interstitial fluids, and VOCs from skin perspiration wherein the concentrations of analytes are very low, and the possibility of interferences is very high. By the novel fabrication technique, sensors can be boosted to reach outstanding sensitivity and selectivity by material nano-elaboration and nano-pixelation. The high-resolution patterning of nanochannel structures makes it possible to detect single nanoobjects within nanofluidic and nano-size sensors, to realize nanogaps for nanobatteries and single-layer nanomaterialsbased FET transistors as well as high-density nano pixel sensor arrays. Further nanodevices for the photonics, micro-optics, plasmonics, and complex structures can be realized with the maskfree scanning thermal probe lithography at low-costs and high throughput with an x-y resolution in the nm range and a z-resolution in the sub-nm range. In comparison to conventional nanolithography techniques, like electron beam lithography, the novel device is suitable for rapid prototyping and precisely shaping and locating 2D/3D nanostructures. This facility significantly strengthens the research possibilities at the university within the topical focus on “materials and smart systems” and provides an outstanding infrastructure. Local, national and international cooperation can be boosted to initiate novel research and exchange projects.

为了实现高性能，可重复，稳定的多功能传感器，大大超出了现有技术，必要的工具和设备，在纳米级的制造和原位表征是特别重要的。宏观和微观范围内的常见结构工具无法满足所需的小型化，并且无法实现高分辨率。这限制了传感器在灵敏度和准确度方面的性能，并缩小了研究能力和研究转移前景。此外，亚纳米级表面的修饰和调整也是开发具有附加功能的传感器的要求之一，并提高了传感器的应用范围。所要求的设备能够通过热扫描探针光刻和激光直写在多种材料上进行非侵入性纳米加工和纳米设备的精确结构化，并提供原位成像能力。因此，具有纳米级分辨率的功能化可以用具有几纳米的高度局部化分辨率的分子和生物分子缀合来实现。特别地，化学传感器可以由此显著地小型化，并且达到飞摩尔范围内的检测下限，以满足关键应用的要求，例如。G.在医疗保健和安全应用中。高度小型化的传感器阵列可以用高度灵敏的传感器来实现，该传感器可以在非侵入性应用中实现，诸如用于监测汗液、组织液和来自皮肤汗液的VOC的可穿戴设备，其中分析物的浓度非常低，并且干扰的可能性非常高。通过这种新的制造技术，可以通过材料的纳米精细化和纳米像素化来提高传感器的灵敏度和选择性。纳米通道结构的高分辨率图案化使得可以检测纳米流体和纳米尺寸传感器内的单个纳米物体，以实现纳米电池和基于单层纳米材料的FET晶体管以及高密度纳米像素传感器阵列的纳米间隙。用于光子学、微光学、等离子体和复杂结构的另外的纳米器件可以利用无掩模扫描热探针光刻以低成本和高产量实现，其中x-y分辨率在nm范围内，z分辨率在亚nm范围内。与传统的纳米光刻技术（如电子束光刻）相比，该新型设备适用于快速原型制作以及精确成形和定位2D/3D纳米结构。该设施大大加强了大学在“材料和智能系统”主题范围内的研究可能性，并提供了出色的基础设施。可以促进地方、国家和国际合作，以启动新的研究和交流项目。