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SEM-SPM system based on the next generation multimodal microscopy

基于下一代多模态显微镜的SEM-SPM系统

基本信息

批准号：
13650031
负责人：
OHO Eisaku
金额：
$ 2.11万
依托单位：
Kogakuin University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

In multimodal microscopy, that is, an useful combination between SEM, SPM (scanning probe microscope) and VM(video microscope)), this technology will be actively applied in the near future in order to improve the performance and usability of the hybrid SEM system. The system might be difficult to use practically, because it is a combination between two microscopes with greatly different characteristics.In the field of SEM, we can find several techniques for obtaining height information. Surface topography measurements using digital image processing roughly fall into one of three categories, i.e., multiple detectors, focusing, and stereometric methods. By using multiple detectors, detected intensities (either BSE or SE signal) may be related to the surface slope of the area being scanned by the incident beam. The profile is obtained by numerical integration of the slopes in the direction of the scan line. In the reconstruction process of surface topographies, the noise in the digitized detector signals accumulates in an unpredictable way during the course of the integration, thereby leading to artifacts that heavily distort the resulting surface. In order to settle this problem, used least-square-techniques which are a sort of smoothing techniques of an image. This type of system is suitable for specimens with protrusions, or depressions with less steep slopes such as compact disks. In order to improve the accuracy of the surface topography, in multiple detectors system, setting suitable parameters and use of digital image processing techniques are performed. As a result, its accuracy is similar to that of AFM in low magnification observation.

在多模态显微镜中，即SEM，SPM（扫描探针显微镜）和VM（视频显微镜）之间的有用组合，该技术将在不久的将来被积极应用，以提高混合SEM系统的性能和可用性。该系统可能很难实际使用，因为它是两个具有很大不同特性的显微镜之间的组合。在SEM领域，我们可以找到几种获得高度信息的技术。使用数字图像处理的表面形貌测量大致分为三类之一，即，多检测器、聚焦和立体测量方法。通过使用多个检测器，检测到的强度（BSE或SE信号）可以与入射光束扫描的区域的表面斜率相关。通过在扫描线方向上对斜率进行数值积分来获得轮廓。在表面形貌的重建过程中，数字化检测器信号中的噪声在积分过程中以不可预测的方式积累，从而导致严重扭曲所得表面的伪影。为了解决这一问题，采用了一种图像平滑技术--最小二乘法。这种类型的系统适用于具有突起或凹陷的样品，如光盘。为了提高表面形貌测量的精度，在多探测器系统中，设置合适的参数和使用数字图像处理技术。结果表明，在低倍观察时，其精度与原子力显微镜相当。