EVALUATION OF DYNAMIC BEHAVIOUR OF MICTOMATERIALS FABRICATED BY SPUTTEINR AND ION-IMPLANTATION METHODS

微型机械在医疗和工程领域中具有重要的应用前景，因为它们需要在非常狭窄的空间和恶劣的环境中工作。微机械的运动受表面性质的强烈控制，如摩擦、流体阻力、润湿性、吸附、腐蚀等，因为微材料的表面积比体积大得多。本研究取得了以下主要结果：（1）离子注入TiN膜提高了TiN膜的耐蚀性和抗氢化物生成能力。(2)在重复的纳米压痕试验中，当压痕深度与薄膜厚度相当时，TiN和AlN薄膜以及非晶SiC薄膜的压痕深度出现向后偏移。这一事实对应于膜中的大的残余压应力通过膜的部分脱层释放。残余压应力较大的SiC膜后向偏移的程度大于TiN和AlN膜。在较小载荷附近，SiC薄膜的深度恢复较大，这是由于在压头下方发生了分层。(3)金属、玻璃和陶瓷的表面载荷-位移曲线因残余应力、表面粗糙度、表面微裂纹、压实行为和塑性变形的存在而不同。(4)压痕速度越慢，压痕后向偏移越大，这是由于压痕肩部堆积越多，导致薄膜在该处分层。（5）用原子力显微镜测量了金属和陶瓷的动摩擦系数，结果表明，动摩擦系数随作用力、表面粗糙度和湿度的增大而增大，但与探针的扫描速度无关。因此，利用纳米压痕仪和原子力显微镜可以获得有关微材料和薄膜表面和界面性质的新信息。

Micro-machines will act an important role especially in medical and engineering area where they should be operated in very narrow space and in severe environments. The movement of micro-machine is strongly controlled by surface properties, such as friction, fluid resistance, wettability, adsorption, corrosion, etc., because the surface area of micro materials is much larger than the volume. Consequently, surface modification of micro materials and evaluation of surface properties are very important.From present researches following results were obtained : (1) Ion implantation on TIN film sputtered on titanium substrate increases the corrosion and hydride formation resistances. (2) During repeating nano-indentation tests, when the indent depth is comparable with film thickness, the indent depth of TIN and AIN films and amorphous Sic film reveals backward deviation. This fact corresponds that large residual compressive stress in the films is released by partial delamination of films. The degree of backward deviation is larger for SiC film with larger residual compressive stress than TiN and AIN films. Large depth recovery is observed for SiC film near smaller load due to the delamination just under indenter. (3) The load-displacement curves of surface are different in bulk metals, glasses and ceramics, depending on the existence of residual stress, surface roughness, surface micro-cracks, compaction behavior, and plastic deformation. (4) Slower indentation speed results in larger backward deviation due to larger piling up of indent shoulder that introduces delamination of film at the position. (5)Dynamic friction coefficients measured by atomic force microscope for metals and ceramics increase with increasing applied force, surface roughness and humidity but not depend on scanning speed of probe. Thus, new information on the surface an interfacial properties of micro-materials and thin films were obtained by using nano-indenter and atomic force microscope.