High performance Micro-Materials and micro-TAS by controlling high ordered Nano-Structures

通过控制高有序纳米结构实现高性能微材料和微TAS

• 批准号: 12450102
• 负责人: KOTERA Hidetoshi
• 金额: $ 9.66万
• 依托单位: Kyoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-12450102/
• 关键词: MEMS; Mechanical properties; tensile test; Material distribution; Thin film material properties; Genetic algorithm; micro-TAS; Micro-pump; Micro-mixer; 薄膜の変形; 厚さ分布; 遺伝的アルゴリズム

In conventional method MEMS is produced by the photolithography process, such as PVD, CVD, dry etching and/or wet etching. Since it is hard to fabricate many parts to perform designed function in micro-meter order field, a novel method is necessary for MEMS. We focused on a photolithography process, we proposed a distribution of materials to realize a designed function for micro-pump and micro actuators.A series of equation to simulate micro-membrane deflection is defined and a new simulation algorithm to simulate the material distribution that performs a designed function is proposed. Comparing the calculated results with experimental ones, the efficacy of the proposed method is discussed.As example of proposed idea, bi-directional valve-less micro-pump using piezoelectric micro-array actuator and micro-mixer is fabricated.As another method to perform a designed function, a modification of thin film after deposition is investigated. Since the electro-mechanical properties of PZT thin film is strongly depends on its internal stress, we have shown a possibility to modify PZT thin film properties by tensile stress and/or compression stress after deposition.

在常规方法中，MEMS通过光刻工艺（诸如PVD、CVD、干法蚀刻和/或湿法蚀刻）来制造。由于在微米量级的领域中，很多器件很难实现所设计的功能，因此需要一种新的方法来实现微机电系统。以光刻工艺为研究对象，提出了实现微泵和微驱动器设计功能的材料分布模型，定义了一系列模拟微薄膜变形的方程，提出了一种新的模拟实现设计功能的材料分布的模拟算法。将计算结果与实验结果进行了比较，讨论了该方法的有效性，并以压电微阵列驱动器和微混合器为例，制作了双向无阀微泵;以薄膜沉积后的改性为例，研究了实现设计功能的方法。由于PZT薄膜的机电性能强烈地依赖于其内部应力，我们已经表明了通过沉积后的拉伸应力和/或压缩应力来修改PZT薄膜性能的可能性。

项目成果

Hidetoshi Kotera: "DEVELOPMENT OF MICROMIXER BASED ON INSTABILITY OF INTERFACE BETWEEN TWO IMMISCIBLE LIQUIDS"Micro total analysis systems 2002. 2002. 88-90 (2002)

Hidetoshi Kotera：“基于两种不互溶液体之间界面不稳定性的微混合器的开发”微全分析系统 2002. 2002. 88-90 (2002)

S. Yakushiji, I. Kannno, S. Kawano, H. Kotera: "BI-DIRECTIONAL VALVE-LESS MICROPUMP USING PIEZOELECTRIC MICRO-ARRAY ACTUATORS"Micro total analysis systems 2002. 148-150 (2002)

S. Yakushiji、I. Kannno、S. Kawano、H. Kotera：“使用压电微型阵列执行器的双向无阀微型泵”微型全分析系统 2002. 148-150 (2002)

Hidetoshi Kotera: "機械的ひずみによるPZT薄膜の誘電特性の制御に関する研究"電気学会論文誌E. 120・E,12. 559-564 (2000)

小寺秀俊：“通过机械应变控制 PZT 薄膜的介电特性的研究” 日本电气工程学会会刊 E. 120・E, 12. 559-564 (2000)

Hidetoshi Kotera: "A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization"TRIBOLOGY TRANZACTIONS. Vol.43,4. 842-846 (2000)

Hidetoshi Kotera：“空气对 MEMS 器件动态运动的影响及其形状优化的研究”TRIBOLOGY TRANZACTIONS。

Hidetoshi Kotera: "PIEZOELECTRIC PROPERTIES OF PZT THIN FILM"Materials Science for The 21^<st> century, The Society of Materials Science. B. 193-196 (2001)

Hidetoshi Kotera：“PZT 薄膜的压电特性”21 世纪材料科学，材料科学学会。