High performance Micro-Materials and micro-TAS by controlling high ordered Nano-Structures

在传统方法中，MEMS是通过光刻工艺制造的，例如PVD、CVD、干法蚀刻和/或湿法蚀刻。由于在微米级领域很难制造许多零件来执行设计的功能，因此 MEMS 需要一种新颖的方法。我们专注于光刻工艺，提出了材料分布以实现微泵和微执行器的设计功能。定义了一系列模拟微膜偏转的方程，并提出了一种新的模拟算法来模拟执行设计功能的材料分布。将计算结果与实验结果进行比较，讨论了该方法的有效性。作为所提出想法的示例，使用压电微阵列致动器和微混合器制造了双向无阀微型泵。作为执行设计功能的另一种方法，研究了沉积后薄膜的改性。由于 PZT 薄膜的机电性能很大程度上取决于其内应力，因此我们展示了沉积后通过拉伸应力和/或压缩应力来改变 PZT 薄膜性能的可能性。

In conventional method MEMS is produced by the photolithography process, such as PVD, CVD, dry etching and/or wet etching. Since it is hard to fabricate many parts to perform designed function in micro-meter order field, a novel method is necessary for MEMS. We focused on a photolithography process, we proposed a distribution of materials to realize a designed function for micro-pump and micro actuators.A series of equation to simulate micro-membrane deflection is defined and a new simulation algorithm to simulate the material distribution that performs a designed function is proposed. Comparing the calculated results with experimental ones, the efficacy of the proposed method is discussed.As example of proposed idea, bi-directional valve-less micro-pump using piezoelectric micro-array actuator and micro-mixer is fabricated.As another method to perform a designed function, a modification of thin film after deposition is investigated. Since the electro-mechanical properties of PZT thin film is strongly depends on its internal stress, we have shown a possibility to modify PZT thin film properties by tensile stress and/or compression stress after deposition.