High performance Micro-Materials and micro-TAS by controlling high ordered Nano-Structures

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In conventional method MEMS is produced by the photolithography process, such as PVD, CVD, dry etching and/or wet etching. Since it is hard to fabricate many parts to perform designed function in micro-meter order field, a novel method is necessary for MEMS. We focused on a photolithography process, we proposed a distribution of materials to realize a designed function for micro-pump and micro actuators.A series of equation to simulate micro-membrane deflection is defined and a new simulation algorithm to simulate the material distribution that performs a designed function is proposed. Comparing the calculated results with experimental ones, the efficacy of the proposed method is discussed.As example of proposed idea, bi-directional valve-less micro-pump using piezoelectric micro-array actuator and micro-mixer is fabricated.As another method to perform a designed function, a modification of thin film after deposition is investigated. Since the electro-mechanical properties of PZT thin film is strongly depends on its internal stress, we have shown a possibility to modify PZT thin film properties by tensile stress and/or compression stress after deposition.