Research on Testing Methods for Micro-fatigue strength of Micro-Nano Devices.

微纳器件微疲劳强度测试方法研究。

• 批准号: 13650281
• 负责人: MIHARA Yutaka
• 金额: $ 1.92万
• 依托单位: Kagawa University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650281/
• 关键词: mechanical properties of material; mechanical properties of nano-material; photo-lithography; SOI base material; comb shape actuator; マイクロ部材強度試験; ナノ部材強度試験; 櫛形アクチュエーター; 櫛型アクチュエーター

Micro-and nano-tecnology will play a very important roll in the field of IT, medical technology, biotechnology and so on as a key technology for a new innovation and social development. Though many researches has been done to build in new functions to micro-and nano-devices, a few fundamental studies on mechanical properties of micro-and nano-material has been done for the reliability of micro devices. The purpose of our researches is (1) to make a testing machine for measuring the mechanical properties of micro-material and micro devices, (2) to collect data of mechanical properties of micro-materials and enable to use the materials with high reliability.As a research of first step, we made a fatigue and strength testing machine in bending using micro-machine fabrication technology of Si single crystal photo lythography. The features of the testing machine are as follows. (1) Measuring and control of very small weight loading can be done by voltage control because a comb type actuator of static electricity is applied. (2) The shape of the loading actuator can be a pair of tweezers which enable the test of fluctuating stress of reverse type. (3) The testing machine and the specimen are separate type, which enable the test of any material. (4) The test can be done in a scanning microscope, which enable the test of micro-and nano-material.The performance of the testing machine is as follows. (1)Loading weight is 0.0005N〜0.005N. (2)Loading deflection is 14 micron. (3)Fluctuating frequency is 10KHz.Using the testing machine fatigue test of Si single crystal of 50μ^W×5μ^T were carried out. 8 specimen were tested in repeated stress cycle with maximum stress 0.0025〜0.005N and the frequency 50He〜3KHz. Specimen were failed after fluctuating number 5×10^5〜9×10^5 without any trouble in testing machine.

微纳米技术作为一项新的创新和社会发展的关键技术，将在信息技术、医疗技术、生物技术等领域发挥非常重要的作用。虽然在微纳器件中加入新功能方面已经做了很多研究，但是在微纳器件可靠性方面，对微纳材料力学性能的基础研究还很少。我们的研究目的是：(1)制造一台测量微材料和微器件力学性能的试验机；(2)收集微材料的力学性能数据，使材料能够高可靠性地使用。作为研究的第一步，我们利用硅单晶光刻微机械加工技术制作了弯曲疲劳强度试验机。试验机的特点如下：(1)由于施加了梳状静电致动器，因此可以通过电压控制来测量和控制非常小的重量负载。(2)加载执行机构的形状可以是一对镊子，可以进行反向波动应力的测试。(3)试验机与试样为分离式，可对任何材料进行试验。(4)可在扫描显微镜下进行测试，可对微纳米材料进行测试。试验机的性能如下：(1)负载重量0.0005N ~ 0.005N。(2)加载挠度为14微米。(3)波动频率为10KHz。利用试验机对50μ^W×5μ^T的硅单晶进行了疲劳试验。8个试样在最大应力为0.0025 ~ 0.005N，频率为50He ~ 3KHz的重复应力循环中进行试验。试样在波动数5×10^5 ~ 9×10^5后失效，在试验机中无任何故障。