Micro calorimeter array for space research

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We obtained new research results in the following four different areas. (1)To obtain a high quantum efficiency, we measured the R-T relation and crystal structure of Bismuth membranes, then fabricated TES calorimeters with a Bismuth absorber. The energy resolution remain at 20 eV, but we identified potential problems which restrict the energy resolution ; thermal conductivity at the boundary between the TES and the absorber, and thermal conductivity inside Bismuth membrane. (2)We fabricated a 16x16 format TES calorimeter array with electrodes and an X-ray absorber attached to every pixel., which demonstrates that such a large array can be fabricated with our fabrication process. (3)We investigated theoretical aspect of frequency division signal multiplex and developed a SQUID driver electronics which satisfies the requirement obtained from the theoretical study. (4)We studied warm/hot intergalactic matter associated with nearby cluster of galaxies, which will be useful for future astrophysical mission using the TES calorimeter arrays.