Development of X-ray and infrared detectors using micromachining technologies

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We studied new approaches to develop imaging microcalorimeters. We fabricated test models to confirm the new ideas experimentally. Major results are summarized below.(1) Micrormachine processing to fabricate microcalorimeter pixel structuresWe developed processes suited for imaging device. Finally we succeeded to fabricate calorimeter pixels with dry processes alone.(2) Fabrication of X-ray absorber on the calorimer pixel with micromachine processingWe developed new processes utilizing plating to fabricate X-ray absorbers of "mushroom structure" which covers the calorimeter pixels with high covering efficiencies.(3) Ti-Au bilayer TES thermometersIn our calorimeters, the temperature is sensed by the superconducting transition edge sensors (TES). We developed TES with Ti-Au bilayer membrane.(4) Microcalorimeter imaging readout systemNumber of signal lines allowed between the cryogenic to room temperatures is very limited. We developed a new method to multiplex calorimeter signals on frequency space. We developed a SQUID with multiple number of input coils and experimentally proved our new approach with a two-pixel calorimeter.(5) Evaluation of the X-ray microcalorimetersWe evaluated the energy resolution of our X-ray microcalorimeter operating at 200 mK.The energy resolution was 99 eV.This is not good enough. We studied the extra noise factors which limit our resolutions.