Development of X-ray and infrared detectors using micromachining technologies

利用微加工技术开发 X 射线和红外探测器

• 批准号: 09440092
• 负责人: MITSUDA Kazuhisa
• 金额: $ 8.77万
• 依托单位: Institute of Space and Astronautical Science
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B).
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-09440092/
• 关键词: Detectors; X-ray; infrared; Spectrometer; Superconductors; microcalorimeters; bolometers; SQUID; SQUID array amp.; Imaging; micromachining

We studied new approaches to develop imaging microcalorimeters. We fabricated test models to confirm the new ideas experimentally. Major results are summarized below.(1) Micrormachine processing to fabricate microcalorimeter pixel structuresWe developed processes suited for imaging device. Finally we succeeded to fabricate calorimeter pixels with dry processes alone.(2) Fabrication of X-ray absorber on the calorimer pixel with micromachine processingWe developed new processes utilizing plating to fabricate X-ray absorbers of "mushroom structure" which covers the calorimeter pixels with high covering efficiencies.(3) Ti-Au bilayer TES thermometersIn our calorimeters, the temperature is sensed by the superconducting transition edge sensors (TES). We developed TES with Ti-Au bilayer membrane.(4) Microcalorimeter imaging readout systemNumber of signal lines allowed between the cryogenic to room temperatures is very limited. We developed a new method to multiplex calorimeter signals on frequency space. We developed a SQUID with multiple number of input coils and experimentally proved our new approach with a two-pixel calorimeter.(5) Evaluation of the X-ray microcalorimetersWe evaluated the energy resolution of our X-ray microcalorimeter operating at 200 mK.The energy resolution was 99 eV.This is not good enough. We studied the extra noise factors which limit our resolutions.

我们研究了开发成像微量热计的新方法。我们制作了测试模型来通过实验证实新想法。主要结果总结如下。 (1)微量热计像素结构的微机械加工我们开发了适合成像设备的工艺。最终，我们成功地仅采用干法工艺制造了热量计像素。（2）通过微机械加工在热量计像素上制作X射线吸收器我们开发了利用电镀的新工艺来制造“蘑菇结构”的X射线吸收器，该吸收器以高覆盖效率覆盖热量计像素。（3）钛金双层TES温度计在我们的热量计中， 温度由超导过渡边缘传感器 (TES) 感测。我们开发了带有Ti-Au双层膜的TES。(4)微热量计成像读出系统低温到室温之间允许的信号线数量非常有限。我们开发了一种在频率空间上复用量热计信号的新方法。我们开发了具有多个输入线圈的SQUID，并通过两像素量热计实验证明了我们的新方法。（5）X射线微量热计的评估我们评估了我们的X射线微量热计在200 mK下运行的能量分辨率。能量分辨率为99 eV。这还不够好。我们研究了限制我们分辨率的额外噪声因素。

项目成果

T.Oshima,R.Fujimoto, et al.: "Performance of SII SQUID Amplifiers"Conference series of Astronomical Society of Pacific ('New Century of X-ray Astronomy'ed. by H.Kunieda et al.). (印刷中). (2001)

T.Oshima、R.Fujimoto 等人：“SII SQUID 放大器的性能”太平洋天文学会系列会议（“X 射线天文学的新世纪”，由 H.Kunieda 等人编着）（正在印刷中）。 ）（2001）。

前神佳奈、満田和久、藤本龍一、庄子習一、他: "チタン薄膜を用いたX線マイクロカロリメータの開発" 搭載機器基礎開発成果報告書. 12(印刷中). (1999)

Kana Maegami、Kazuhisa Mitsuda、Ryuichi Fujimoto、Shuichi Shoko 等人：“使用钛薄膜的 X 射线微量热计的开发”12 机载设备的基本开发报告（1999 年）。

R.Fujimoto, K.Mitsuda, T.Miyazaki, K.Maegami, Y.Aruga, T.Oshima, M.Yamazaki, S.shoji, H.Kudo, Y.Yokoyama, T.Mihara, H.M.Shimizu: "Development of a superconduting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments an

R.Fujimoto、K.Mitsuda、T.Miyazaki、K.Maegami、Y.Aruga、T.Oshima、M.Yamazaki、S.shoji、H.Kudo、Y.Yokoyama、T.Mihara、H.M.Shimizu：“开发

R.Fujimoto,K.Mitsuda, 他: "Development of a superconducting X-ray microcalorimeter with a titanium/gold thin film as a thermometer"Nuclear Instruments and Methods, A. 444. 180-183 (2000)

R. Fujimoto、K. Mitsuda 等人：“以钛/金薄膜作为温度计的超导 X 射线微量热计的开发” 核仪器和方法，A. 444. 180-183 (2000)

Hiroyuki Kudo, Yuichi Yokoyama, Shuichi Shoji, Yoichi Aruga, Ryuichi Fujimoto, Kazuhisa Mitsuda, Toshiyuki Miyazaki: "Development of the high energy resolution X-ray Microbolometer for detecting Cosmic Rays"in Proceedings of the 2nd Int.Symp.on Electroche

Hiroyuki Kudo、Yuichi Yokoyama、Shuichi Shoji、Yoichi Aruga、Ryuichi Fujimoto、Kazuhisa Mitsuda、Toshiyuki Miyazaki：“用于检测宇宙射线的高能分辨率 X 射线微测辐射​​热计的开发”，第二届 Int.Symp.on Electroche 论文集