Clustering reaction control in plasma CVD for fabricating high efficiency solar cells

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We have developed clustering reaction control in plasma CVD for fabricating high efficiency a-Si:H solar cells. Following results are obtained in this study.1.We have developed a filter for eliminating cluster contribution to films. We have suppressed the contribution to films 1/100 times as low as that to conventional device quality films.2.We have succeeded in depositing a-Si:H films which show little light induced defects by using the filter together with a cluster-suppressed plasma CVD.3.We have developed multi-hollow discharges for realizing cluster-free a-Si:H.4.We have succeeded in fabricating a Ni/a-Si:H/n^+ c-Si Schottkey cell which has a littile light induced degradation of 4%.These results indicates that suppression of contribution of clusters to films is the key to stable high efficiency a-Si:H solar cell.