Trial production ofa double source cluster deposition system and its application to fabricating new functional materials

在本研究计划期间，我们取得了以下研究成果：我们研制了一种新的团簇沉积系统，其中电源可以独立地施加到两个团簇源上，用于制备复合团簇组件，并将该系统应用于一项专利。通过调整阴极布置、阴极角度和喷嘴形状，我们大大提高了团簇的生产率。采用传统的双团簇源系统制备了Si（或Al）和Fe复合团簇组装体，并对其结构和化学成分进行了观察。当两种不同的团簇碰撞时，Si（或Al）和Fe团簇在衬底上独立存在。当它们在碰撞初期相互碰撞时，Fe核团簇被小的Si（或Al）团簇覆盖，形成核壳团簇。磁性和X射线光电子能谱的测量表明，这种核壳团簇是相当稳定的抗氧化。填充分数。随着偏压V_B的增加，Fe团簇组装体的P_A和饱和磁化强度M_S迅速增加，磁性显著降低。在V_B=-20 kV时得到的Fe团簇组装体的P_A= 86%，M_S=17.8 kG，介电常数小于1 Oe，室温电阻率是Fe块体金属的10倍以上。所得纳米粒子受氧化和杂质的影响较小，但可大量生产，且通过调节合适的表面活性剂，其形状和排列是可控的。

We have obtained the following research results during the period of this research plan.We produced a new cluster deposition system in which electrical powers can be independently applied to two cluster sources for preparing composite cluster assemblies and applied this system to a patent By adjusting the cathode arrangement, cathode angle and nozzle shapes, moreover, we have dramatically improved the cluster productivity. : the cluster production efficiency is two order of magnitude higher than usual glow discharge cluster deposition systems.We prepared Si (or Al) and Fe composite cluster assemblies by a conventional double cluster source system and observed their structure and chemical composition. When two different kind clusters collide each other in the later stage, Si (or Al) and Fe clusters independently existed on the substrate. When they collide each other in the early stage, Fe core clusters are covered with small Si (or Al) clusters, forming a core-shell clusters. Magnetic and X-ray photoelectron spectroscopy measurements demonstrated that such core shell clusters were rather stable against oxidation.We deposited ionized clusters which were accelerated electrically and impinged on a electrically biased substrate. Packing fraction. P_A and saturation magnetization, M_S of Fe cluster assemblies increase rapidly and magnetic coercivity decreases remarkably with increasing the bias voltage, V_B. The Fe cluster-assembly obtained at V_B=-20 kV has P_A=86%, M_S=17.8 kG, and the coercivity value smaller than 1 Oe. The resistivity at room temperature is ten times larger than that of bulk Fe metal.Moreover, we tried to prepare Fe nano-particles via liquid phase routes and observe their structure, magnetic and optical properties for comparison. The obtained nano-particles were a little degraded by oxidation and impurities, however, they are mass-productive and their shape and arrangement are controllable with adjusting the suitable surfactants.