Trial production ofa double source cluster deposition system and its application to fabricating new functional materials

在本次研究计划期间，我们获得了以下研究成果：我们开发了一种新的簇沉积系统，在该系统中，电力可以独立地应用于两个簇源来制备复合簇组件，并申请了专利。通过调整阴极排列、阴极角度和喷嘴形状，我们大大提高了簇的生产率。：与普通辉光放电团簇沉积系统相比，该系统的团簇生产效率提高了两个数量级。采用传统的双星团源系统制备了Si（或Al）和Fe复合星团，并对其结构和化学成分进行了观察。当两种不同类型的团簇在后期相互碰撞时，Si（或Al）和Fe团簇独立存在于衬底上。当它们在早期相互碰撞时，铁核团簇被小的Si（或Al）团簇覆盖，形成核壳团簇。磁性和x射线光电子能谱测量表明，这种核壳团簇具有相当稳定的抗氧化性。我们沉积了电离团簇，它们被电加速并撞击在电偏置的衬底上。包装分数。随着偏置电压V_B的增加，铁团簇的P_A和饱和磁化强度M_S迅速增加，矫顽力显著降低。在V_B=-20 kV条件下得到的Fe团簇的P_A=86%, M_S=17.8 kG，矫顽力值小于1 Oe。室温下的电阻率是块状铁金属的十倍。此外，我们尝试通过液相途径制备铁纳米颗粒，并观察其结构，磁性和光学性质进行比较。制备的纳米颗粒受氧化和杂质的影响较小，但可以批量生产，并且通过调节合适的表面活性剂可以控制纳米颗粒的形状和排列。

We have obtained the following research results during the period of this research plan.We produced a new cluster deposition system in which electrical powers can be independently applied to two cluster sources for preparing composite cluster assemblies and applied this system to a patent By adjusting the cathode arrangement, cathode angle and nozzle shapes, moreover, we have dramatically improved the cluster productivity. : the cluster production efficiency is two order of magnitude higher than usual glow discharge cluster deposition systems.We prepared Si (or Al) and Fe composite cluster assemblies by a conventional double cluster source system and observed their structure and chemical composition. When two different kind clusters collide each other in the later stage, Si (or Al) and Fe clusters independently existed on the substrate. When they collide each other in the early stage, Fe core clusters are covered with small Si (or Al) clusters, forming a core-shell clusters. Magnetic and X-ray photoelectron spectroscopy measurements demonstrated that such core shell clusters were rather stable against oxidation.We deposited ionized clusters which were accelerated electrically and impinged on a electrically biased substrate. Packing fraction. P_A and saturation magnetization, M_S of Fe cluster assemblies increase rapidly and magnetic coercivity decreases remarkably with increasing the bias voltage, V_B. The Fe cluster-assembly obtained at V_B=-20 kV has P_A=86%, M_S=17.8 kG, and the coercivity value smaller than 1 Oe. The resistivity at room temperature is ten times larger than that of bulk Fe metal.Moreover, we tried to prepare Fe nano-particles via liquid phase routes and observe their structure, magnetic and optical properties for comparison. The obtained nano-particles were a little degraded by oxidation and impurities, however, they are mass-productive and their shape and arrangement are controllable with adjusting the suitable surfactants.