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Trial production ofa double source cluster deposition system and its application to fabricating new functional materials

双源团簇沉积系统的试制及其在新型功能材料制备中的应用

基本信息

批准号：
14205093
负责人：
SUMIYAMA Kenji
金额：
$ 29.12万
依托单位：
Nagoya Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

项目摘要

We have obtained the following research results during the period of this research plan.We produced a new cluster deposition system in which electrical powers can be independently applied to two cluster sources for preparing composite cluster assemblies and applied this system to a patent By adjusting the cathode arrangement, cathode angle and nozzle shapes, moreover, we have dramatically improved the cluster productivity. : the cluster production efficiency is two order of magnitude higher than usual glow discharge cluster deposition systems.We prepared Si (or Al) and Fe composite cluster assemblies by a conventional double cluster source system and observed their structure and chemical composition. When two different kind clusters collide each other in the later stage, Si (or Al) and Fe clusters independently existed on the substrate. When they collide each other in the early stage, Fe core clusters are covered with small Si (or Al) clusters, forming a core-shell clusters. Magnetic and X-ray photoelectron spectroscopy measurements demonstrated that such core shell clusters were rather stable against oxidation.We deposited ionized clusters which were accelerated electrically and impinged on a electrically biased substrate. Packing fraction. P_A and saturation magnetization, M_S of Fe cluster assemblies increase rapidly and magnetic coercivity decreases remarkably with increasing the bias voltage, V_B. The Fe cluster-assembly obtained at V_B=-20 kV has P_A=86%, M_S=17.8 kG, and the coercivity value smaller than 1 Oe. The resistivity at room temperature is ten times larger than that of bulk Fe metal.Moreover, we tried to prepare Fe nano-particles via liquid phase routes and observe their structure, magnetic and optical properties for comparison. The obtained nano-particles were a little degraded by oxidation and impurities, however, they are mass-productive and their shape and arrangement are controllable with adjusting the suitable surfactants.

在本研究计划期间，我们获得了以下研究成果。我们生产了一种新型的团簇沉积系统，其中电力可以独立地施加到两个团簇源上以制备复合团簇组件，并将该系统申请了专利。通过调整阴极排列、阴极角度和喷嘴形状，我们极大地提高了团簇生产率。：团簇生产效率比普通辉光放电团簇沉积系统高两个数量级。我们通过传统的双团簇源系统制备了Si（或Al）和Fe复合团簇组件，并观察了它们的结构和化学成分。当两种不同种类的团簇在后期相互碰撞时，Si（或Al）和Fe团簇独立存在于基体上。当它们在早期相互碰撞时，Fe核团簇被小的Si（或Al）团簇覆盖，形成核壳团簇。磁和X射线光电子能谱测量表明，这种核壳簇对氧化相当稳定。我们沉积了电离簇，这些簇被电加速并撞击在电偏置基底上。包装分数。随着偏置电压V_B的增加，Fe团簇组件的P_A和饱和磁化强度M_S迅速增加，而磁矫顽力显着降低。在V_B=-20 kV下获得的Fe团簇体P_A=86%，M_S=17.8 kG，矫顽力值小于1 Oe。室温下的电阻率比块状铁金属大十倍。此外，我们尝试通过液相路线制备铁纳米粒子，并观察其结构、磁学和光学性质以进行比较。所获得的纳米颗粒因氧化和杂质而降解，但它们具有批量生产性，并且通过调节合适的表面活性剂可以控制其形状和排列。