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Simultaneous detection of positive and negative scanning ion images using a focused ion beam

使用聚焦离子束同时检测正负扫描离子图像

基本信息

批准号：
14550028
负责人：
SEKI Setsuko
金额：
$ 2.37万
依托单位：
Takushoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2004
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550028/
关键词：
secondary ion image liquid metal ion source SIMS beveling method focused ion beam ion implantation イオン注入政府二次イオン同時検出 FIB LMIS

项目摘要

An instrument to simultaneously obtain the positive and negative ion images by scanning a focused ion beam (FIB) of a liquid-metal-ion source (LMIS) has been developed. It consists of primary ion irradiation column, sample chamber, extracting and detecting system for secondary ions, and data processing system. The structural features of the instrument are as follows: scanning ion beam axis is perpendicular to the sample which is held in a horizontal plane; the positive and negative secondary ions are extracted to the separate directions by extractors which face each other in a symmetrical position to the scanning beam axis. By this arrangement the electric field formed by the voltages applied to the extractors hardly affects the deflection of the primary ion beam. The secondary ions are detected as follows: 1) an LMIS beam scans on the sample surface; 2) the sputtered positive and negative secondary ions are separately and simultaneously extracted by the electric fields; 3) the secondary ions are converted to electrons by bombarding the converters made of aluminum; 4) the electrons are accelerated toward scintillators to generate photons; 5) the photon signals are detected and amplified by photomultipliers; 6) two channels of output signals synchronized with the scanning signal are processed by computer. Thus the positive and negative ion images of the same point are displayed on a monitor. The author confirmed that each part of the instrument normally works, and that the positive and negative ion images of a mesh sample are properly observed.Moreover, to further advance the SIMS analyzing technique the measuring method was also developed. In this study, the secondary ion image analysis by Ga-FIB on a beveled layered sample was investigated. This technique was especially useful for a rough surface sample as an alternative to SIMS depth profiling.

开发了一种通过扫描液态金属离子源（LMIS）的聚焦离子束（FIB）同时获得正负离子图像的仪器。它由一次离子辐照柱、样品室、二次离子提取和检测系统、数据处理系统组成。该仪器的结构特点是：扫描离子束轴垂直于水平面内的样品；正二次离子和负二次离子通过在相对于扫描束轴对称的位置彼此面对的提取器被提取到不同的方向。通过这种布置，由施加到提取器的电压形成的电场几乎不影响初级离子束的偏转。二次离子检测如下： 1) LMIS 光束在样品表面扫描； 2)溅射出的正、负二次离子分别被电场同时提取； 3)通过轰击铝制成的转换器将二次离子转化为电子； 4）电子被加速向闪烁体产生光子； 5）光电倍增管检测并放大光子信号； 6）两路与扫描信号同步的输出信号由计算机处理。这样，同一点的正离子和负离子图像就显示在监视器上。作者证实仪器各部分工作正常，并且可以正确观察网状样品的正离子和负离子图像。此外，为了进一步推进SIMS分析技术，还开发了测量方法。在本研究中，研究了 Ga-FIB 对斜面层状样品的二次离子图像分析。该技术对于粗糙表面样品特别有用，可作为 SIMS 深度剖析的替代方法。