Active Printed Circuit Boards/Three-Dimensional Micro Optical Switching Systems and Resource-Saving Device Integration Processes

点击翻译按钮获取中文摘要

In order to reduce size/cost of optical interconnects within boxes, we proposed "Three-Dimensional(3-D) Stacked Optoelectronic(OE) System LSI" and "3-D Micro Optical Switching System (3D-MOSS)" based on the following strategies : constructing 3-D architecture, embedding thin-film devices into waveguide films, and forming self-organized inter-film optical wiring. We obtained results described below.1.3D-MOSS can achieve 1024x1024 optical switching with a system size of-1.4x0.6 cm^2 and insertion loss of 29 dB, which correspond to an occupation area reduction of 3/100 and loss reduction of 14 dB comparing with the conventional planar structure.2.A resource-saving device integration process "Photolithographic Packaging with Selectively-Occupied Repeated Transfer (PL-Pack with SORT)," which integrates different types of active elements into one substrate in desired distributions using all-photolithographic process, was found to be able to decrease consumption of embedded functional materials down to 1/10〜1/10000, resulting in drastic cost reduction. The proof-of-concept of the process was demonstrated experimentally.3.Waveguide films with surface-normal mirrors were fabricated by the built-in mask method. The method will realize cost-effective mass production of waveguide films with fine-pitch micro mirrors of arbitrary directions with maximized positional accuracy and with minimized processing cost. The proof-of-concept of the process was demonstrated experimentally.4.To reduce fabrication cost of optical Z-connections, we proposed to apply Self-Organized Lightwave Network(SOLNET) to the vertical waveguide formation. The beam propagation method reveals that, while 25% waveguide misalignment in film assembly raises the insertion loss up to 73 dB in 3D-MOSS, SOLNET can reduce it down to 31 dB. Experimental works demonstrated high coupling efficiencies of SOLNET with wide tolerance, indicating that SOLNET is effective for 3-D optical wiring construction.