A Two-dimensional Image Sensor With the Ability of Detecting the Incident Angle of a Light

为了获取空间信息，使用大多数基于激光的位置测量系统，例如测距仪和运动捕获系统，以便在光已经投射到对象上之后接收反射光，或者直接接收来自连接到对象的光源的光。激光通常用于这种系统，因为它具有高强度、高方向性和单色性的优点[1]。在测量系统中，激光的高方向性从两个角度来看是有用的：光的能量的传输和光路的维持。光的能量的传输通常用于测量。相比之下，光路的维护就没那么有用了。由于关于光路的信息包括关于对象的位置或方向的信息，因此在测量中利用关于光路的信息在基于激光的测量系统…中具有巨大的发展潜力为了获取关于光路的信息，需要使用能够检测光的位置和入射角的传感器。已经研制出专门用于检测光斑位置的传感器和专门用于检测入射角度的传感器。前者通常使用的传感器是电荷耦合器件[2]。或PSD(位置敏感设备)[3]。后者的一个例子已经由滨松光子学公司销售[4]。然而，能够同时检测光斑位置和角度的传感器还没有开发出来，到目前为止，已经使用了传统的传感器，如CCD或PSD。因此，普通的基于激光的位置测量技术采用的是只利用光斑的像素位置的算法，如果图像传感器可以同时检测光的入射角和位置，那么这种图像传感器就可以有效地应用于许多场合。因此，我们以前提出了一种一维传感器类型[5]。它可以测量传感器在y方向给定位置上的一维位置和一维入射角度。在本项目中，我们描述了以前传感器的扩展版本，包括一个可以测量二维位置和二维入射角度的二维型传感器。我们设计并建造了一个实现该原理的二维传感器系统的原型。我们首先通过测量原型传感器系统的位置和入射角来检验其精度。接下来，通过将该传感器应用于二维位置测量，对该传感器的有效性进行了测试，实验结果证明了该位置传感器的实用精度。较少

To acquire spatial information, most laser-based position measurement systems, such as rangefinders and the motion capture system, are utilized so as to receive the reflected light after light has been projected onto an object, or to directly receive the light from a light source attached to the object. A laser is often used for such a system because it has the advantage of high intensity, high directivity, and monochromaticity [1]. In measuring systems, the high directivity of the laser is useful from two points of view : the transmission of the energy of the light and the maintenance of the optical path. The transmission of the energy of the light is often used for the measurement. In comparison, the maintenance of the optical path has seen less use. Since information on the optical path includes information on the position or orientation of objects, utilization of the information on the optical path in measurements has great potential for development in laser-based measurement syste … More ms.In order to acquire information on the optical path, it is necessary to use a sensor that is able to detect both the position and the incident angle of the light. A sensor exclusively for detecting the position of alight spot and a sensor exclusively for detecting the incident angle have already been developed. The sensor typically used for the former is a CCD (charge coupled device) [2]. or a PSD (position sensitive device) [3]. An example of the latter has been marketed by the Hamamatsu Photonics Co [4]. However, a sensor which can simultaneously detect the position and the angle of a light spot has not yet been developed, and up to now, conventional sensors such as the CCD or PSD have been used. Ordinary laser-based position measurement techniques using a CCD or PSD have, as a result, employed algorithms exclusively using the light spot's pixel position.if an image sensor can detect both the incident angle of a light and its position, this image sensor could be effectively applied to a number of situations. Thus, we have previously proposed a one-dimensional sensor type [5]. which can measure a one-dimensional position and one-dimensional incident angle onto the sensor at a given position of a y-direction.In this project, we describe the development of the extended version of the previous sensor, consisting of a two dimensional type sensor which can measure a two-dimensional position and two-dimensional incident angle.We have designed and built a prototype of this two-dimensional sensor system in which the proposed principle is implemented. We first examined its accuracy by measuring the position and the incident angle of the prototype sensor system. Next, we tested the usefulness of the sensor by applying it to a two-dimensional position measurement.Experimental results demonstrate the practicable accuracy of the proposed position sensors. Less