Fabrication of High Performance Thick Film Magnets by Aerosol Deposition Method

气溶胶沉积法制备高性能厚膜磁体

• 批准号: 15360378
• 负责人: SUGIMOTO Satoshi
• 金额: $ 9.66万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2005
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15360378/
• 关键词: aerosol deposition method; thick film; permanent magnet; anisotropy; remanence; coercivity; deposition rate; film density; エアロゾルデポジション; 残留磁束密度; ビッカース強度; 微細結晶

1. PurposeRare earth magnets with small thickness are strongly demanded in the trend of downsizing motors and electromagnetic devices. The aerosol deposition (AD) method is one of the attractive methods for the fabrication of thick films with thickness of several μm to 500 μm. The deposition rate is around 5-50 μm/min, which 500-5000 times faster than conventional sputtering method. Therefore, in this investigation, we applied this method for the fabrication of high performance thick film magnets and investigated its possibility.2. Results(1) Fabrication of Sm-Fe-N AD Films and their Magnetic Properties : Since the thickness of Sm-Fe-N AD films fabricated on glass substrate was around 45 μm after deposition of 10 min, the thickness reached to 190 μm after the deposition using brass substrate. The deposition rate was estimated as 15-19 μm/min. The films showed the remanence (Br) of 0.4-0.6 T and the coercivities (μ_0H_<cJ>) increased from 1.6-1.8 T. These coercivities were higher than t … More hat of primary raw powders. The microvickers hardness of the AD films was around 500-700. The AD films consisted of α-Fe and Sm_2Fe_<17>N_x phases and the grain size was around 200-400 μm, which was one order smaller than that of primary powders.(2) Fabrication of anisotropic Sm-Fe-N AD Films : It is concluded that the c-axis of Sm-Fe-N has a tendency to align along the magnetic field by using magnets or solenoid coils. Especially, applying magnetic fields of 0.19 T in plane, the remanence measured along the applied field increased with increasing the magnetic field. The maximum value of remanence was 0.54 T, which was 29% higher than that without the applied field (0.42 T).(3) Possibility of Fe_3B/Nd_2Fe_<14>B Nanocomposite AD Films : Hysteresis loop and XRD analysis revealed that the raw powders was nanocomposite powders consisted of Fe_3B and Nd_2Fe_<14>B phase. The larger powder size of raw powders (12.45 μm) influenced the deposition rate and film thickness. The as-deposited AD film exhibited high remanence but low coercivity (H_<cJ>=0.84 kOe), though the film consisted of the Fe_3B and Nd_2Fe_<14>B phases. In addition, the coercivity further decreased by the annealing in Ar. These low coercivities were considered to be related to the relatively low anisotropy field of Nd_2Fe_<14>B phase, the defects induced during the AD method and the presence of α-Fe phase. Less

1.研究目的在电动机和电磁设备小型化的趋势下，强烈需要厚度小的稀土磁体。气溶胶沉积（AD）法是制备厚度为几μm至500 μm的厚膜的有吸引力的方法之一。沉积速率约为5-50 μm/min，比常规溅射方法快500-5000倍。因此，在本研究中，我们将此方法应用于高性能厚膜磁体的制备，并探讨其可能性.结果（1）Sm-Fe-NAD薄膜的制备及其磁性：在玻璃衬底上沉积10 min后，Sm-Fe-NAD薄膜的厚度约为45 μm，而在黄铜衬底上沉积10 min后，Sm-Fe-NAD薄膜的厚度达到190 μm。沉积速率为15-19 μm/min，薄膜的剩磁（Br）为0.4- 0.6T，矫顽力（μ H<cJ>）从1.6- 1.8T增加。这些电导率均高于t ...更多信息 主要原料粉末的帽子。AD膜的显微硬度约为500-700。AD薄膜由α-Fe和Sm_2Fe_N_x<17>相组成，晶粒尺寸约为200-400 μm，比原始粉末小一个数量级。(2)各向异性Sm-Fe-N AD薄膜的制备：通过使用磁体或螺线管线圈，得出Sm-Fe-N的c轴具有沿着磁场取向的趋势。特别是在平面内施加0.19 T的磁场时，沿着外加磁场测量的剩磁随磁场的增加而增加。剩磁的最大值为0.54 T，比未施加磁场时的剩磁（0.42 T）提高了29%。(3)Fe_3 B/Nd_2Fe_<14>B纳米复合AD薄膜的可能性：磁滞回线和X射线衍射分析表明，原料粉末是由Fe_3 B和Nd_2Fe_ B相组成的纳米复合粉末<14>。原料粉末的粒径较大（12.45 μm），影响沉积速率和膜厚。沉积态AD膜<cJ>由Fe 3 B和Nd 2 Fe B相组成，但具有高的剩磁和低的矫顽力（H = 0 84 kOe）<14>。此外，在Ar中退火进一步降低了双折射率。这些低的矫顽力被认为与Nd_2Fe_ B相的各向异性场相对较低<14>、AD法中引入的缺陷以及α-Fe相的存在有关。少

项目成果

杉本諭: "エアロゾル・デポジション法による永久磁石の薄型化"(社)日本応用磁気学会 第l32回研究会試料(2003年11月28日). 1-8 (2003)

Satoshi Sugimoto：“通过气溶胶沉积法减薄永磁体”，日本应用磁学学会，第 132 届研究会议样本（2003 年 11 月 28 日）1-8（2003 年）。

Nd_2Fe_<14>B/Fe_8B nanocomposite film fabricated by aerosol deposition method

气溶胶沉积法制备Nd_2Fe_<14>B/Fe_8B纳米复合薄膜

• 发表时间: 2006
• 期刊: Journal of Alloys and Compounds 408-412
• 作者: Tomohito Maki;S.Sugimoto;S.Sugimoto
• 通讯作者: S.Sugimoto

Effect of applied field during aerosol deposition on the anisotropy of Sm-Fe-N thick films

气溶胶沉积过程中施加场对 Sm-Fe-N 厚膜各向异性的影响

• 发表时间: 2005
• 期刊: Journal of Magnetism and Magnetic Materials 290-291, part 2,
• 作者: Tomohito Maki;S.Sugimoto;S.Sugimoto;S.Sugimoto
• 通讯作者: S.Sugimoto

Microstructure and Magnetic Properties of the Aerosol-Deposited Sm-Fe-N Thick Films

气溶胶沉积 Sm-Fe-N 厚膜的微观结构和磁性能

• 发表时间: 2004
• 期刊: IEEJ Trans.FM 124, 10
• 作者: Tomohito Maki;S.Sugimoto;S.Sugimoto;S.Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;S.Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;Satoshi Sugimoto;S.Sugimoto;S.Sugimoto;Tomohito Maki;Satoshi Sugimoto;小林亮平;槙 智仁;Tomohito Maki;Satoshi Sugimoto;Ryohei Kobayashi;Tomohito Maki
• 通讯作者: Tomohito Maki

Sm-Fe-N Thick Film Magnets Fabricated by Aerosol Deposition Method

气溶胶沉积法制备 Sm-Fe-N 厚膜磁体

• 发表时间: 2005
• 期刊: Transactions of the Materials Research Society of Japan 30
• 作者: K.Naito;Y.Benino;T.Fujiwara;R.Sato;T.Komatsu;小松高行;S. Sugimoto;Satoshi Sugimoto
• 通讯作者: Satoshi Sugimoto