Synthesis of near future electromagnetic noise suppressor with nano-granular structure and their application to electric devices.

1.GHz电磁噪声抑制器的研究：对不同电阻率的纳米颗粒软磁薄膜进行了研究，发现在GHz频段具有良好的电磁噪声抑制器。纳米颗粒膜的噪声抑制效应主要来源于两种损耗，即磁损耗和电阻损耗(涡流损耗)。研究还发现，适用于可选电子设备的噪声抑制器是通过将由薄膜成分引起的两个损耗组合而实现的。低温镀膜方法的建立：衬底温度(TSUB.)在常规溅射沉积中，最高可提高到100℃或更高，特别是在反应溅射的情况下，最高可提高到300℃左右。TSUB的高温限制了薄膜的应用领域。我们试图利用对向靶溅射系统，在低于100℃的温度下找到沉积方法。通过对溅射参数的系统研究，在沉积过程中实现了TSUB小于85℃。这种新方法不仅扩展了硅和玻璃的衬底材料，还直接扩展了具有低相变温度的聚合物或电子器件。实际应用测试：采用2中所示的沉积方法在LSI表面溅射沉积了纳米颗粒软磁薄膜。在沉积过程中，LSI中没有发现任何机械或电气损伤。用微磁探针法测量了表面的电磁噪声。与裸LSI相比，覆盖了该薄膜的LSI表面有了相当大的噪声抑制，达到了上述研究目的。

1. Investigation of electromagnetic noise suppressor at GHz range : Nano-granular soft magnetic films with different electric resistivity were investigated to find the excellent electromagnetic noise suppressor at GHz band. The noise suppression effect of nano-granular films has been found to originate in two losses, that is, magnetic loss and electric resistive loss (eddy current loss). It is also found that noise suppressor suitable for optional electric devices is realized by combining two losses which is attributed to film compositions.2. Establishment of film deposition method at low temperature : The substrate temperature (Tsub.) increases up to 100 C or more in conventional sputtering deposition, especially, around 300 C in the case of reactive spattering. Such a high temperature of Tsub limits the application field of the film. We have tried to find the deposition method in lower Tsub than 100 C using Facing Targets Sputtering System. Systematically investigating the parameters of sputtering is found to realize Tsub less than 85 C during deposition. The new method expands the substrate materials not only Si and glass but also polymer with low phase transformation temperature or electric devices directly.3. Test for practical application : The nano-granular soft magnetic films were sputter-deposited on the surface of LSI by the deposition method shown in 2. We could not find any mechanical or electrical damage in LSI with the deposition. The electromagnetic noise from the surface has been evaluated by a micro magnetic probe method. Considerable amount of noise suppressing is observed in the surface of LSI covered with the films, compared with the result of nude LSI.All the research objectives have been achieved, described above.