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電気泳動堆積法による高周波対応軟磁性フェライト膜の室温形成

采用电泳沉积法室温形成高频兼容软磁铁氧体薄膜

基本信息

批准号：
16760250
负责人：
枦修一郎
金额：
$ 2.3万
依托单位：
Gifu University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Young Scientists (B)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2005
项目状态：
已结题

项目摘要

電気泳動堆積法による軟磁性フェライト膜の室温形成手法の確立を目的として、本年度の研究より得られた知見を以下に示す。1.前年度の検討結果を基にして、NiZnフェライト微粒子からなる膜の作製を行ったところ、懸濁液のpH=2.7,極板間印加電圧:1.2V,30分の成膜時間において12μmの膜厚が得られ、成膜速度にして毎分約400nmと高速な成膜が可能となった。またこの膜の高周波透磁率特性の評価を行ったところ、成膜時に磁気異方性制御を行っておらず膜は等方的であるため、強磁性共鳴周波数は約1GHz程度、透磁率の実部であるμ'は約6〜8程度を示した。2.高周波特性改善のため、成膜時の微粒子に磁界を印加し異方性制御が可能か検討を行った。磁界印加は永久磁石により行い、本年度購入したガウスメータにより磁界強度を60〜300G(ガウス)の範囲で調節した。しかしながら永久磁石による磁界印加は磁場勾配が大きく堆積基板付近の良質な磁気特性を示す微粒子濃度が低下し、大きな異方性の付与は困難であった。この膜の共鳴周波数は2GHzまで上昇したが、μ'は5以下まで低下した。良質な微粒子の欠乏により飽和磁化が低下したためであると考えられる。3.プリント基板および導電性薄膜(ITO)が形成された基板を用いて、フェライト微粒子の堆積を試みた。基板上の導電層の種類によって電気泳動堆積を行う際の懸濁液pHは若干異なるものの、概ね膜の形成は可能であった。しかしながら乾燥後の膜表面には、数μm幅の細かいひび割れが確認されるものもあり、導電層の厚さや成膜時の電流密度など、成膜条件について詳細な検討を積み重ねていく必要がある。以上より、平成17年度の研究計画を全て遂行し、上記のような研究成果をあげることができた。またこれらの成果の一部は11に記載した学術雑誌"IEEE Tran.Magn."に論文として掲載されている。

The electrophoretic dynamic reactor method was used to determine the purpose of the formation of the magnetic film at room temperature. the results of this year's study show that we have obtained the following information. 1. The results of the previous year were as follows: in the previous year, the results of the previous year were as follows: in the previous year, the results of the previous year were as follows: in the previous year, the results of the previous year were as follows: in the previous year, the results of the previous year were as follows: the results of the previous year were as follows: in the previous year, the results showed that in the previous year, the results of the previous year were as follows: in the previous year, the results showed that in the previous year, the results of the previous year were as follows: in the previous year, the results showed that in the previous year, the results of the previous year were as follows: in the previous year, the results showed that in the previous year, the results of the previous year were as follows: in the previous year, the results of the previous year were as follows: in the previous year, the results showed that The high-cycle magnetic permeability characteristics of the film are affected by the high-cycle magnetic permeability characteristics of the film, the magnetic properties of the film, the magnetic properties of the film, the 1GHz of the film, the magnetic permeability of the film and the magnetic permeability of the film. two。 High-cycle characteristics improve the magnetic field of microparticles during the formation of the film. The permanent magnet of the magnetic world is in the range of 60,300G (permanent magnet) for this year. The magnetic field, the magnetic field and the substrate. The total cycle number of the membrane is 2GHz, and the number of waves below μ'5 is low. The fine particles are short of low magnetization and low magnetization. 3. On the substrate, the electrical film (ITO) is formed. The substrate is used to test the micro-particle reactor. The electrophoretic reactor on the substrate is used in the production of high-performance liquid pH, and the membrane is likely to be affected. After drying, the surface of the film is fine, and several microns are used to make sure that the temperature of the film is different, the current density of the film is high, and the conditions of film formation are very important. The above research projects in Pingcheng in the 17th year have been completed, and the research results have been completed in the previous year. There is an 11-year-old journal "IEEE Tran.Magn." I don't know what to say.