DEVELOPMENT OF VACUUM CONPATIBLE NON-CONTACT PRECISION POSITIONING MECHANISM INCLUDING PNUEMATIC ACTUATOR

近年来，集成电路尖端的最小宽度迅速减小到50nm以下。因此，下一代光刻技术将不再使用传统的激光光束，而将在真空室中处理硅片，以避免极紫外光射束反射镜的损坏。因此，在本研究中，我们提出了一种采用表面补偿轴承的真空兼容空气静压直线导轨系统。在表面补偿轴承中，加压空气可以从固定导轨馈送，移动滑块不需要油管。此外，提出的导轨系统采用气缸作为执行机构，以避免磁场的产生。本研究的目的是：1。阐明该定位系统所用表面补偿式空气静压轴承的静、动态特性。当所提出的导轨设置在真空腔内，滑块通过气缸移动更多的r时，腔内的真空可以达到10-5[Pa]的量级。利用气缸实现0.1 μm量级的定位精度。根据本文的研究目标，设计并制造了气动导轨系统，并对其定位精度和腔室真空度进行了实验。结果得出以下结论：(a)。在表面补偿轴承中，当在加压空气进料管中插入多孔节流器时，表面补偿轴承的静刚度增加，而不会引起不稳定的振动。在真空室内设置试验导轨时，试验室内的真空度不能达到10-5 [Pa]量级。这是因为真空泵排气槽流动阻力的影响比较大，在设计排气系统时应考虑到这一影响。实验结果表明，为该导轨系统设计的气缸可达到lμm级的定位精度。少

Recently, the minimum width of IC tip has been rapidly decreased to less than 50 nm. Accordingly, it is said that the conventional leaser beam will not be used for the next generation lithography and a silicon wafer will be handled in the vacuum chamber to avoid the damage of reflection mirrors for EUV beam. Therefore, in this research, we proposed a vacuum compatible aerostatic linear guideway system using surface compensated bearings. In surface compensated bearings, pressurized air can be fed from the fixed guideway and no tubing is needed for a moving slider. In addition, the proposed guideway system uses an air cylinder as an actuator to avoid the generation of magnetic field. The objectives of this research are :1. To clarify static and dynamic characteristics of surface compensated aerostatic bearings used in this positioning system.2. To achieve the order of 10-5[Pa] of the vacuum can be achieved in the chamber when the proposed guideway is set in a vacuum chamber and the slide … More r is moved by an air cylinder.3. To achieve the order of 0.1 μm of the positioning accuracy by using the air cylinder.According to the objectives of this research, we designed and manufactured the proposed aerostatic guideway system and then conducted experiments for the positioning accuracy and the vacuum degree of the chamber. As a result, the following conclusions were obtained.(a). In a surface compensated bearing, when a porous restrictor was inserted in a feeding tube of pressurized air, the static stiffness of the surface compensated bearing is increased without causing any vibration for instability.(b). The vacuum degree in the chamber could not reach the order of 10-5 [Pa] when the test guideway was set in the vacuum chamber. This is because the effect of the flow resistance of exhaust groove for vacuum pumps is relatively large and this effect should be taken into account in designing the exhaust system.(c).It is experimentally confirmed that the order of the positioning accuracy of lμm can be achieved by an air cylinder designed for the proposed guideway system. Less