Non-contact precision quideway systems for high vacuum chamber Using ionic liquid

传统的真空兼容的非接触导轨系统已经使用了空气静压轴承，该空气静压轴承具有使用真空泵的多个密封步骤。因此，这些系统需要相对大的空间用于密封件和若干真空泵。因此，在这项研究中，我们提出了液体静压导轨系统使用离子液体代替空气静压导轨系统。所提出的系统不需要任何密封系统来保持真空，这使得用于真空室的导轨系统简单且小。我们开发了一个静压旋转主轴和静压线性导轨工作台使用离子液体，并证实了建议的导轨系统的实用性。

Conventional vacuum compatible non-contact guideway systems have used aerostatic bearings with several steps of seals using vacuum pumps. Accordingly, these systems require relatively large space for seals and several vacuum pumps. Therefore, in this study, we proposed hydrostatic guideway systems using ionic liquid instead of aerostatic guideway systems. The proposed system does not need any seal systems to maintain vacuum, which makes the guideway system for a vacuum chamber simple and small. We developed a hydrostatic rotational spindle and a hydrostatic linear guideway table using ionic liquid and confirmed the usefulness of the proposed guideway system.