Non-contact precision quideway systems for high vacuum chamber Using ionic liquid

传统的真空兼容非接触导轨系统使用空气静压轴承，使用真空泵进行几个步骤的密封。因此，这些系统需要相对较大的密封件和几个真空泵的空间。因此，在本研究中，我们提出了用离子液体代替空气静压导轨系统。该系统不需要任何密封系统来保持真空，使得真空室导轨系统简单而小巧。利用离子液体研制了静压旋转主轴和静压直线导轨转台，验证了所提出的导轨系统的有效性。

Conventional vacuum compatible non-contact guideway systems have used aerostatic bearings with several steps of seals using vacuum pumps. Accordingly, these systems require relatively large space for seals and several vacuum pumps. Therefore, in this study, we proposed hydrostatic guideway systems using ionic liquid instead of aerostatic guideway systems. The proposed system does not need any seal systems to maintain vacuum, which makes the guideway system for a vacuum chamber simple and small. We developed a hydrostatic rotational spindle and a hydrostatic linear guideway table using ionic liquid and confirmed the usefulness of the proposed guideway system.