Basic research of the viscous micropump using spiral rotor

微泵的发展关系到微机械的燃料供应系统，因此具有重要的意义。在微区，雷诺数极低，使用粘度的方法对旋转式泵是有效的。本文提出了一种新型的带槽转子粘性微泵。通过理论分析和模型实验对其压力特性进行了研究。在理论分析中，采用了直线管道的二维润滑理论。在模型实验中，以甘油为工质实现了实际微泵内的低雷诺数流动，并对厘米尺度（非微米尺度）模型泵进行了检验。在压力特性方面，理论计算结果与实验结果基本一致。得到的零流量压力比现有粘性微泵的压力大得多。

The development of the micro pump is important because it is related to the fuel supply system of the micro-machine. In micro area, the Reynolds number is extremely low, and the method of using the viscosity is effective for the rotation type pump. In this research, a new viscous micropump using rotor with groove is proposed. Its pressure characteristics are investigated by using a theoretical analysis and a model experiment. In the theoretical analysis, the two-dimensional lubrication theory for a straight duct is adopted. In the model experiment, the low Reynolds number flow in practical micropumps is realized by using glycerin as working fluid, and a centimeter-scale (not micrometer-scale) model pump is examined. With respect to the pressure characteristics, the theoretical results show qualitative agreement with the experimental ones. The pressure at zero flow rate obtained is quite larger than that of an existing viscous micropump.