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Development of Optical Sensor Probe for Deep Hole Measurement Using Position Sensitive Detector

使用位置敏感探测器开发用于深孔测量的光学传感器探头

基本信息

批准号：
18560260
负责人：
NISHIBORI Kenji
金额：
$ 2.41万
依托单位：
Daido Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2006
资助国家：
日本
起止时间：
2006 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560260/
关键词：
Optical Measurement Position Sensitive Detector Deep Hole Sensor Probe Distance Measurement Measuring Equipment Scattered Light Light Source

项目摘要

There is no equipment that measures a diameter and an inclination angle of a comparatively slender deep hole in casting and so on with high accuracy by non-contact and easy method.This research proposes optical sensor probe to measure a distance to a wall surface using an optical fiber and a position sensitive detector (PSD). The light emitted by the cylindrical sensor probe is reflected on the surface of the object and focused on the 2-dimensional PSD through a lens.The following conclusions are summarized from the experiments and the discussions.(1) When the distance L between a sensor probe and a wall is in a range of 0.4mm≦L≦2.6mm, the measurement accuracy is less than of 10μm. This is enough precision in practical use.(2) Considering a refractive index of a covering film on the 2 dimensional PSD, an experiment agrees with a theory in the relationship between the displacement of spotlight on PSD and the distance to the measurement wall.(3) The inside diameter of and the inclination angle can be measured instantly by using this system, when three sources of light are installed in the circumference of the sensor probe.(4) The distance L between a sensor probe and a wall is almost proportional to the displacement of the spotlight on the 2 dimensional PSD.(5) The distance can be measured precisely without the influence of an inclination angle of a measurement side, as the scattered light is utilized.(6) When the position of the 2 dimensional PSD is arranged in the probe's root side, the smaller size of sensor probe is realized.

目前还没有设备可以通过非接触式、简单的方法高精度测量铸件等中相对细长的深孔的直径和倾斜角度。本研究提出了光学传感器探头，使用光纤和位置敏感探测器（PSD）测量到壁面的距离。圆柱形传感器探头发出的光线在物体表面反射，通过透镜聚焦在二维PSD上。通过实验和讨论，得出以下结论：(1)当传感器探头与墙壁之间的距离L在0.4mm≤L≤2.6mm范围内时，测量精度小于10μm。这在实际使用中已经足够精度。(2)考虑到二维PSD上覆盖膜的折射率，实验符合PSD上聚光灯的位移与到测量墙的距离之间的关系的理论。(3)当传感器探头的圆周上安装三个光源时，使用该系统可以立即测量内径和倾斜角。(4)距离传感器探头与墙壁之间的L几乎与二维PSD上聚光灯的位移成正比。(5)由于利用了散射光，可以精确测量距离，而不受测量侧倾斜角度的影响。(6)当二维PSD的位置布置在探头的根侧时，实现了传感器探头的更小尺寸。