Development of electron excited X-ray holography for micro-area 3D atomic structure analysis

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We proposed the "electron excited X-ray holography", which can record the atomic resolution hologram by measuring an electron beam direction dependence of characteristic X-ray intensities from a sample. In this work, Ti K hologram was measured with 6 keV electron beam and atomic images of neighboring Sr and Ti were successfully reconstructed from its Fourier transform. Moreover, as advanced applications of atomic resolution holography, local lattice distortions of the mixed crystal of the diluted magnetic semiconductor Zn_<0.4>Mn_<0.6>Te and the shape memory alloy of Ti_<50>Ni_<44>Fe_6 were successfully estimated.