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Growth and properties of metastable cubic group III nitride semiconductors by developing a surface structure control method

Growth and properties of metastable cubic group III nitride semiconductors by developing a surface structure control method
通过开发表面结构控制方法实现亚稳态立方III族氮化物半导体的生长和性能
批准号:
20360011
负责人:
OHACHI Tadashi
金额:
$12.06万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
2008
资助国家:
日本
项目状态:
已结题
起止时间:
2008 至 2010

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英文摘要
Preparation of an AlN double buffer layer (DBL) on a β-Si_3N_4 layer by the interfacial reaction between Al and the β-Si_3N_4 layer was developed by controlling two electrical discharge modes of the high frequency induction coupling electrical discharge in molecular-beam epitaxy (MBE) method. Activity modulation migration enhanced (AM-MEE) method was established as a continuous MBE method by preparing the AlN/β-Si3N4/Si DBL layer firstly. In addition, the prospect to the growth of thermodynamically metastable cubic crystals, AlN and GaN epitaxial films on Si substrates was able to be obtained by the AM-MEE method.
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DOI: 10.1016/j.jcrysgro.2010.04.014
发表时间: 2010-09
期刊: Journal of Crystal Growth
影响因子: 1.8
作者: [Y. Kangawa;K. Kakimoto]
通讯作者: Y. Kangawa;K. Kakimoto
Crack in HVPE grown 2H-AlN films on AlN templatesprepa red by PA-MBE using AM-MEE
使用 AM-MEE 通过 PA-MBE 在 AlN 模板上制备红色 HVPE 生长的 2H-AlN 薄膜中的裂纹
DOI: --
发表时间: 2011
期刊:
影响因子: --
作者: [T.Ohachi, N.Yamabe, Y.Yamamoto, H.Murakami, Y.Kumagai, A.Koukitu]
通讯作者: A.Koukitu
Differential thermal analysis of Li3N-Al pseudobinary system for AlN growth
用于 AlN 生长的 Li3N-Al 准二元体系的差热分析
DOI: --
发表时间: 2010
期刊:
影响因子: --
作者: [Tomoe Yayama, Y.Kangawa, K.Kakimoto]
通讯作者: K.Kakimoto
Nitrdation of Si(111) for growth of 2H-AlN(0001)/β-Si3N4/Si(111)structure
Si(111) 氮化生长 2H-AlN(0001)/β-Si3N4/Si(111) 结构
DOI: --
发表时间: 2009
期刊: J.Crystal Growth 311
影响因子: --
作者: [Y.G.Shi, Y.F.Guo, S.Yu, M.Arai, A.A.Belik, A.Sato, K.Yamaura, E.Takayama-Muromachi, T.Varga, J.F.Mitchell, 原口和敏, N.Yamabe]
通讯作者: N.Yamabe
36
    Study on Single Crystal Growth by Solid State Recrystallization using Defect Sulfide Spinel Compounds
    • 批准号:
      03452294
    • 项目类别:
      Grant-in-Aid for General Scientific Research (B)
    • 资助金额:
      $0.96万
    • 财政年份:
      1991
    • 负责人:
      OHACHI Tadashi
    • 依托单位: