Development of depth profile analysis of nano materials using X-ray energy variable XPS

点击翻译按钮获取中文摘要

Hard X-ray photoemission spectroscopy (HX-XPS) has been developed for the analysis of nano materials using energy-variable hard X-ray at synchrotron radiation facilities. The depth profile analysis by HX-XPS is promising as a quantitative nondestructive depth profile technique. For the further development of this technique, the asymmetry parameter, the emission depth distribution function (EDDF) and energy loss function which govern the HX-XPS spectra should be evaluated quantitatively. This work developed the precise algorism which evaluates these quantities by the combination of the angle-resolved&energy-resolved HX-XPS measurements, Monte Carlo simulation and REELS analysis. As an example, HX-XPS analysis of nano particles, which has core-shell structure (core : Ag, shell: polydiacetylene), has been carried out successfully.