Free Radical sensor based on electron spin resonance measurement probed with micro-inductor

证明了极少量自由基的检测。该方法基于ESR光谱和高频阻抗测量。测量的目的是对超高频段的频率进行扫描。在室温下，用CMOS 350nm工艺制备了双（苯基）-（2,4,6-三硝基苯基）亚氮杂铵（DPPH）滴在微电感上的ESR光谱。DPPH乙醇溶液的体积仅为1ul，微电感上的自旋数估计约为10^<14>。

The detection of very small amount of radicals is demonstrated. The proposed method is based on the ESR spectroscopy and the high-frequency impedance measurement. The measurement was performed to sweep the frequency in the ultra-high frequency band. The ESR spectra of di(phenyl)-(2,4,6-trinitrophenyl)iminoazanium (DPPH) dropped on the micro-inductor which is fabricated with CMOS 350nm technology are observed at room temperature. The volume of the DPPH ethanol solution was only 1ul and the number of the spin on the micro-inductor was estimated at about 10^<14> spin.