Integrated spectrum sensor for measurement of microscopic light emission

点击翻译按钮获取中文摘要

Novel sensor principle is proposed for a spectrophotometric analysis. The phonic filters are implemented in the interconnect layers of the integrated circuit and the active pixel sensors (APS) are formed on the Si chip. The visible or near-infrared spectrum is estimated by data processing with the output from the sensor pixels which have the different spectral-response characteristic. The device is designed by using FDTD simulation and prototyped with CMOS 180nm process. The characteristic spectralresponse for each APS is successfully observed. The prosed sensor device is applicable to the high-speed thermo-vision system, and micro-emission or absorption spectrometry.