Study on high resolution inchworm-type multi-DOF actuator and precise position measurement

研制了一种利用电磁铁的附着力和压电元件的变形来驱动的尺蠖式驱动器。通过六个压电元件的组合，可以实现柔性运动。利用并联机构原理实现六自由度运动，利用尺蠖原理实现三自由度位移。通过使用安装在致动器上的激光光源和位置敏感检测器来测量致动器的位置。通过光源的位置和检测器的输出来测量位置。精度大约是几微米。

An inchworm-type actuator, which was operated by the adhesion of electromagnets and deformation of piezoelectric elements, was developed. Flexible motion could be realized by six combined piezoelectric elements. Six-DOF motion was realized by the principle of a parallel mechanism and three-DOF displacement was realized by the principle of an inchworm. The position of the actuator was measured by the use of laser light sources and position sensitive detectors, which were installed on the actuator. The position was measured by the position of the light sources and the output of the detectors. The accuracy was about a few microns.