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An Investigation of a Fused Design Method on Both Micro-Optics and Mechanics of an Optical Sensing Devices Having High Spatial Resolution

高空间分辨率光学传感器件微光学与力学融合设计方法研究

基本信息

批准号：
20560243
负责人：
OHKUBO Toshifumi
金额：
$ 2.83万
依托单位：
Toyo University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2008
资助国家：
日本
起止时间：
2008 至 2010
项目状态：
已结题

项目摘要

Near-field recording that utilizes extremely compact laser-power focusing onto an aperture and a minute triangular aperture mounted flying head slider have been promising breakthroughs in overcoming difficult optical diffraction limits. The purpose of this research was to experimentally clarify the fundamental characteristics of a triangular aperture which was combined with a polarized light. Obtained main results were as follows. Firstly, clear tendency was obtained that when the polarization direction was perpendicular to the bottom side, the highest spatial (readout) resolution could be obtained suppressing DC offset light power. Detected signal waveforms when changing track width from 500 nm to 100 nm indicated that readout signal amplitude corresponding to the track pattern had its local maximums when the aperture located slightly apart from the geometrical track centre. Readout pattern signal amplitudes were estimated to be approximately proportional to the ratio of the field spread to the track width. Finally, we could successfully confirmed clear readout signal waveform corresponding to the 120 nm L/S pattern formed on the 100 nm wide track, on the condition of 27 nm aperture-to-medium spacing and 12 MHz frequency band.

利用极其紧凑的激光功率聚焦到孔径和安装有飞行磁头滑块的微小三角形孔径的近场记录在克服困难的光学衍射极限方面有望取得突破。这项研究的目的是通过实验阐明与偏振光相结合的三角形孔径的基本特性。获得的主要结果如下。首先，获得了明显的趋势，即当偏振方向垂直于底面时，可以获得最高的空间（读出）分辨率，抑制DC偏移光功率。当磁道宽度从500 nm改变到100 nm时检测到的信号波形表明，当孔径稍微远离几何磁道中心时，对应于磁道图案的读出信号幅度具有其局部最大值。估计读出图案信号幅度大约与场扩展与磁道宽度的比率成比例。最终，在孔径介质间距为27 nm、频带为12 MHz的条件下，成功确认了在100 nm宽轨道上形成的120 nm L/S图案对应的清晰读出信号波形。