An Investigation of a Fused Design Method on Both Micro-Optics and Mechanics of an Optical Sensing Devices Having High Spatial Resolution

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Near-field recording that utilizes extremely compact laser-power focusing onto an aperture and a minute triangular aperture mounted flying head slider have been promising breakthroughs in overcoming difficult optical diffraction limits. The purpose of this research was to experimentally clarify the fundamental characteristics of a triangular aperture which was combined with a polarized light. Obtained main results were as follows. Firstly, clear tendency was obtained that when the polarization direction was perpendicular to the bottom side, the highest spatial (readout) resolution could be obtained suppressing DC offset light power. Detected signal waveforms when changing track width from 500 nm to 100 nm indicated that readout signal amplitude corresponding to the track pattern had its local maximums when the aperture located slightly apart from the geometrical track centre. Readout pattern signal amplitudes were estimated to be approximately proportional to the ratio of the field spread to the track width. Finally, we could successfully confirmed clear readout signal waveform corresponding to the 120 nm L/S pattern formed on the 100 nm wide track, on the condition of 27 nm aperture-to-medium spacing and 12 MHz frequency band.