Development of 3D real time space charge measurement microscope

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Real time space charge measurement systems are also required to observe the localized space charge distribution in insulating materials. Since the space charge behavior is generally transient, a real time measurement system will be also required in the two or three dimensional (2D or 3D) space charge measurement systems. However, a multi-sensor 2D PEA system has been developed ; the number of sensors is limited by A/D converter channel, because the cost of A/D converter is expensive. An improved 2D space charge measurement system in lateral and thickness direction for transient space charge has been developed using the sensor array and semiconductor analog switch unit in the PEA method.