Fabrication of thin-film hydrogen sensors operating at room temperature by photochemical deposition and photochemical doping

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We fabricated highly sensitive room temperature hydrogen sensors based on SnO_2 films. The films were deposited by the photochemical deposition. The deposition solution contained 10mM of SnSO_4 (pH around 1.4). The solution dropped on the substrate was irradiated with the light. The sample annealed at 200℃ showed current increase by a factor>10^3 within 1 min for 5000 ppm hydrogen at room temperature. The sensitivity and response speed were further improved by UV irradiation using a low-pressure Hg lamp both in vacuum and in air.