Fabrication and evaluation of integrated magnetic thin film devices for microwave applications

用于微波应用的集成磁性薄膜器件的制造和评估

• 批准号: 20560321
• 负责人: SATO Toshiro
• 金额: $ 3.08万
• 依托单位: Shinshu University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20560321/
• 关键词: 電子デバイス; 集積回路; 磁性薄膜; 高周波IC; 無線回路

Microwave magnetic thin film devices, embedded in chip size package RF-IC for the 4th generation cell phone, have been fabricated and evaluated. Through the development of high-frequency magnetic materials and their device-application, the improvement schemes for device properties was established, and it was found that the introduction of magnetic material to IC-package is effective for suppressing local induced noise. In addition, basic investigation on the novel tunable inductor and the power inductor for integrated power supply for RF-ICs has also been done. Their new schemes will be effective as the fundamental techniques of the next generation RF-ICs.

第4代手机用射频集成电路（RF-IC）中嵌入的微波磁性薄膜器件已制成并进行了评价。通过高频磁性材料的发展及其在器件中的应用，建立了器件性能的改进方案，发现在ic封装中引入磁性材料可以有效地抑制局部诱导噪声。此外，本文还对射频集成电路集成电源的新型可调谐电感和功率电感进行了基础研究。他们的新方案将成为下一代射频集成电路的基础技术。

项目成果

Fabrication of Planar Power Inductor for Embedded Passives in LSI Package for Hundreds Megahertz Switching DC-DC Buck Converter

用于数百兆赫兹开关 DC-DC 降压转换器的 LSI 封装中嵌入式无源器件的平面功率电感器的制造

• 发表时间: 2011
• 期刊: IEEE Transactions on Mag-netics Vol.47, 2011-No.11 掲載確定
• 作者: H.Ito;A.Takeuchi;S.Okazaki;H.Kobayashi;Y.Sugawa;A.Takeshima;M.Sonehara;N.Matsushita;T.Sato
• 通讯作者: T.Sato

2010年 研究開発の動向と最前線,高周波マイクロ磁気応用技術の最新動向

2010研发趋势与前沿，高频微磁应用技术最新趋势

• 发表时间: 2010
• 期刊: 電気学会論文誌A 130巻
• 作者: 佐藤敏郎;遠藤恭;曽根原誠
• 通讯作者: 曽根原誠

Increase of $Q$-Factor of RF Magnetic Thin Film Inductor by Introducing Slit-Patterned Magnetic Thin Film and Multiline-Conductor Spiral Coil

• DOI: 10.1109/tmag.2011.2147287
• 发表时间: 2011-09
• 期刊: IEEE Transactions on Magnetics
• 影响因子: 2.1
• 作者: T. Maruyama;Y. Obinata;M. Sonehara;K. Ikeda;T. Sato

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CoFeSiO/SiO▼2▼ Magnetic Thin Film Inductor for CSP RF-IC

CoFeSiO/SiO▼2▼ CSP RF-IC用磁性薄膜电感器

• 发表时间: 2010
• 作者: T.Maruyama;M.Yuki;D.Kobayashi;T.Minemura;M.Sonehara;K.Ikeda;T.Sato
• 通讯作者: T.Sato