Plasma processes by high reactivity atmospheric pressure H_2O plasma

研制了以环境影响小的水为等离子体气体的等离子体源。水能有效地吸收微波(2.45 GHz)。设计了一种大气压下产生等离子体的微波谐振腔形式，并利用气流稳定放电。利用该常压等离子体进行了表面清洗、表面处理和有机物分解的研究。由于产生的等离子体密度很高，所以在高密度下产生了活泼的化学自由基。利用这种方法可以进行高速等离子体处理，并证明了常压H2O等离子体的有效性。

The plasma source using the water of the low environmental impact as plasma gas was developed. Water absorbs a microwave (2.45 GHz) efficiently. The form of the microwave resonator was devised for the plasma generation in an atmospheric pressure, and the gas flow was used for stabilization of discharge. Research on the surface cleaning, surface treatment, and organic matters decomposition using this atmospheric pressure plasma was done. Since the density of the generated plasma was high, activity chemically radicals were generated in high density. High-speed plasma treatment could be performed by this, and the effectiveness of atmospheric pressure H_2O plasma was shown.