Plasma processes by high reactivity atmospheric pressure H_2O plasma

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The plasma source using the water of the low environmental impact as plasma gas was developed. Water absorbs a microwave (2.45 GHz) efficiently. The form of the microwave resonator was devised for the plasma generation in an atmospheric pressure, and the gas flow was used for stabilization of discharge. Research on the surface cleaning, surface treatment, and organic matters decomposition using this atmospheric pressure plasma was done. Since the density of the generated plasma was high, activity chemically radicals were generated in high density. High-speed plasma treatment could be performed by this, and the effectiveness of atmospheric pressure H_2O plasma was shown.