A high spatial resolution observation and its quantification of an oxygen radical

在平成14 ~ 15财政年度，进行了以适当的精度和高空间分辨率测量等离子体中氧自由基密度的研究。提纲如下。(1)氧自由基密度定量测量方法的建立由于铂丝的升温是基于氧自由基的表面复合，因此，氧自由基密度可由铂丝的温度来推算。作为将该结果与质谱仪的测量结果进行比较的结果，获得了良好的一致性，并且其变为。显然，氧自由基密度可以从铂丝的温度测量。(2)气体温度对测量影响的研究在测量相对较低密度的氧自由基时，铂丝的温度变化较小，铂丝周围气体温度的影响可能无法忽略。为了解决这个问题，由于同时测量气体温度并考虑影响，因此很明显，在许多情况下影响很小。(3)低密度氧自由基密度测量方法的建立通过将铂丝保持在其向铂丝施加电流并积极发生催化作用的温度区，能够防止低密度时的灵敏度降低。(4)高空间分辨率测量试验利用目前设计的方法，对等离子体中氧自由基密度的空间分布观测进行了尝试。在低密度区，可以用常规方法测量低密度的近两位数自由基密度，并测量了玻璃放电管中自由基的空间分布。

Study for measuring the oxygen radical density in the plasma by proper accuracy and high spatial resolution in the Heisei 14 to 15 fiscal year has been done. The outline is as follows.(1) Establishment of the quantitive measuring method of an oxygen radical densitySince heat up of a platinum wire was based on the surface recombination of an oxygen radical, the oxygen radical density was deduced from the temperature of the platinum wire. As a result of comparing this result with the result of the measurement by a mass spectrometer, good agreement was obtained and it became. clear that an oxygen radical density could be measured from the temperature of the platinum wire.(2) Investigation about the effect of gas temperature on measurementWhen measuring the oxygen radical of lower density comparatively, the temperature changes of the platinum wire are small and effect of-the gas temperature of the surroundings of the platinum wire may be unable to ignore them. In order to solve this, as a result of also measuring gas temperature simultaneously and considering the effect, it became clear that, effect is small in many cases.(3) Establishment of a lower density oxygen radical density measurement methodBy maintaining the platinum wire at the temperature zone where it applies an electric current to a platinum wire, and a catalytic action occurs actively, the sensitivity lowering at the time of lower density was able to be prevented.(4) The test of high spatial resolution measurementWith this method devised so far, the spatial distribution observation of the oxygen radical density in the plasma was tried. In the lower density region, it became clear that the about double figures radical density of lower density could also be measured conventionally, and the spatial distribution in a glass discharge tube has been measured.