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A high spatial resolution observation and its quantification of an oxygen radical

氧自由基的高空间分辨率观测及其定量

基本信息

批准号：
14580524
负责人：
ONO Shigeru
金额：
$ 1.79万
依托单位：
Musashi Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2003
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-14580524/
关键词：
Platinum Oxygen radical Gas temperature Recombination Plasma Positive column Catalytic action Dissociative recombination

项目摘要

Study for measuring the oxygen radical density in the plasma by proper accuracy and high spatial resolution in the Heisei 14 to 15 fiscal year has been done. The outline is as follows.(1) Establishment of the quantitive measuring method of an oxygen radical densitySince heat up of a platinum wire was based on the surface recombination of an oxygen radical, the oxygen radical density was deduced from the temperature of the platinum wire. As a result of comparing this result with the result of the measurement by a mass spectrometer, good agreement was obtained and it became. clear that an oxygen radical density could be measured from the temperature of the platinum wire.(2) Investigation about the effect of gas temperature on measurementWhen measuring the oxygen radical of lower density comparatively, the temperature changes of the platinum wire are small and effect of-the gas temperature of the surroundings of the platinum wire may be unable to ignore them. In order to solve this, as a result of also measuring gas temperature simultaneously and considering the effect, it became clear that, effect is small in many cases.(3) Establishment of a lower density oxygen radical density measurement methodBy maintaining the platinum wire at the temperature zone where it applies an electric current to a platinum wire, and a catalytic action occurs actively, the sensitivity lowering at the time of lower density was able to be prevented.(4) The test of high spatial resolution measurementWith this method devised so far, the spatial distribution observation of the oxygen radical density in the plasma was tried. In the lower density region, it became clear that the about double figures radical density of lower density could also be measured conventionally, and the spatial distribution in a glass discharge tube has been measured.

对平成14-15财年以适当精度和高空间分辨率测量等离子体中氧自由基密度进行了研究。(1)氧自由基密度定量测量方法的建立由于铂丝的加热是基于氧自由基的表面复合，因此氧自由基密度是由铂丝的温度推算出来的。将这一结果与质谱计的测量结果进行了比较，得到了较好的一致性。明确了从铂丝的温度可以测量出氧自由基的浓度。(2)气体温度对测量的影响研究当测量密度相对较低的氧自由基时，铂丝的温度变化很小，而铂丝周围气体温度的影响可能不能忽略。为了解决这一问题，由于同时测量气体温度并考虑到影响，结果表明，在许多情况下，影响很小。(3)建立了一种低密度氧自由基密度测量方法，通过将铂丝保持在其向铂丝施加电流的温度区，并发生积极的催化作用，能够防止在低密度时灵敏度下降。(4)高空间分辨率测量试验。在低密度区，也可以用常规方法测量低密度的近两位数自由基密度，并测量了玻璃放电管中的空间分布。