A high spatial resolution observation and its quantification of an oxygen radical

在平成14 ~ 15会计年度进行了适当精度和高空间分辨率的等离子体氧自由基密度测量研究。提纲如下。(1)氧自由基密度定量测量方法的建立由于铂丝的升温是基于氧自由基的表面复合，所以氧自由基密度由铂丝的温度推导而来。将该结果与质谱仪测量结果进行了比较，得到了较好的一致性。显然，氧自由基密度可以通过铂丝的温度来测量。(2)气体温度对测量影响的探讨在测量相对密度较低的氧自由基时，铂丝的温度变化较小，铂丝周围气体温度的影响可能无法忽略。为了解决这个问题，通过同时测量气体温度并考虑其影响，可以看出，在许多情况下，影响很小。(3)建立低密度氧自由基密度测量方法通过将铂丝保持在对铂丝施加电流的温度范围内，并主动发生催化作用，可以防止低密度时灵敏度的降低。(4)高空间分辨率测量试验利用目前设计的方法，对等离子体中氧自由基密度的空间分布进行了观测。在低密度区域，可以用常规方法测量低密度区域的约两位数自由基密度，并测量了其在玻璃放电管内的空间分布。

Study for measuring the oxygen radical density in the plasma by proper accuracy and high spatial resolution in the Heisei 14 to 15 fiscal year has been done. The outline is as follows.(1) Establishment of the quantitive measuring method of an oxygen radical densitySince heat up of a platinum wire was based on the surface recombination of an oxygen radical, the oxygen radical density was deduced from the temperature of the platinum wire. As a result of comparing this result with the result of the measurement by a mass spectrometer, good agreement was obtained and it became. clear that an oxygen radical density could be measured from the temperature of the platinum wire.(2) Investigation about the effect of gas temperature on measurementWhen measuring the oxygen radical of lower density comparatively, the temperature changes of the platinum wire are small and effect of-the gas temperature of the surroundings of the platinum wire may be unable to ignore them. In order to solve this, as a result of also measuring gas temperature simultaneously and considering the effect, it became clear that, effect is small in many cases.(3) Establishment of a lower density oxygen radical density measurement methodBy maintaining the platinum wire at the temperature zone where it applies an electric current to a platinum wire, and a catalytic action occurs actively, the sensitivity lowering at the time of lower density was able to be prevented.(4) The test of high spatial resolution measurementWith this method devised so far, the spatial distribution observation of the oxygen radical density in the plasma was tried. In the lower density region, it became clear that the about double figures radical density of lower density could also be measured conventionally, and the spatial distribution in a glass discharge tube has been measured.