Analysis of Moving Track of Low Pressure Arc Cathode Spots for Development of High Speed Removing Method of Oxide Layer

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The moving track of low pressure arc cathode spots for development of high speed removing method of oxide layer was elucidated by using the electrode of low pressure arc generation, algorithm of plasma image processing and high speed video camera. As a result, the cathode spot was split and united, repeatedly. In addition, the oxide layer is evaporated and blows up, when the cathode spots contact with the oxide layer and moves at the boundary, continuously. These phenomena were depended by the oxide thickness.