High spatial-resolution crystal structure analysis using annular dark-field imaging

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Annular dark-field(ADF) imaging in scanning transmission electron microscopy(STEM) is an effective tool for the characterization of local crystal structure, because ADF imaging has high compositional sensitivity and intuitive interpretability. In this study, we performed high sensitivity and high precision(10pm) analyses of crystal structures using STEM imaging. We revealed the validity of incoherent imaging approximation of ADF imaging. We also achieved so-called spatially-resolved diffractometry, in which the diffraction patterns are fully acquired as a function of probe coordination to investigate the mechanism of STEM imaging.