Development of an ultra-precision aspheric polishing for small-diameter lens mold by controlling with magnetic field

本研究的目的是利用磁性复合液(MCF)对小直径镜片模具进行磁场控制，开发出精度达到纳米级、表面粗糙度达到亚纳米级的抛光技术。在本研究中，阐明了在脉冲磁场作用下，仅靠抛光工具的二维运动就可以抛光小直径的旋转凹面。在脉冲磁场的情况下，平坦的表面在较宽的表面上更加平坦和平滑。在脉冲磁场下更平滑地保持了具有小直径的凹面的形状精度。

The purpose of this study is to develop the polishing technology of performing the accuracy with nano-meter level and the surface roughness with the sub-nano meter level for mold of small-diameter lens by controlling with a magnetic field utilizing a magnetic compound fluid(MCF). In this study, it was clarified that the rotating concave surface having small diameter is enabled to be polished by the only two-dimensional motion of the polishing tool under the application of a pulsed magnetic field. In the case of pulsed magnetic field, the flat surface is more flattened and smoothed over a wide surface. The form accuracy of the concave surface having small diameter at the pulsed magnetic field is maintained more smoothly.