Inner surface profile measurement of a cylindrical object by an oblique incidence and multiple-wavelength interferometer

利用斜入射多波长干涉仪测量圆柱形物体的内表面轮廓

• 批准号: 21560443
• 负责人: SASAKI Osami
• 金额: $ 3万
• 依托单位: Niigata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21560443/
• 关键词: 光干渉計測; 円筒内面形状; 多波長干渉計; 斜め入射干渉計; 正弦波位相変調; 流体軸受; 計測機器; 2波長干渉計

A collimated line beam is incident at an oblique incident angle into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3. 5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a multiple-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5μm on the inner surface can be measured with an error less than 0. 3μm.

准直线光束以倾斜入射角入射到流体动力轴承的内表面中，该流体动力轴承的内径和长度分别为3mm和3. 5 mm。选择从内表面沿指定方向反射的光以获得相位分布与内表面轮廓成比例的光场。该光场与使用可调谐外腔激光二极管的多波长干涉仪中的参考光场干涉。该方法可以测量内表面深度为5μm左右的沟槽的宽度，误差小于0. 3μm。

项目成果

多波長レーザ干渉計を用いた円筒内面形状計測

使用多波长激光干涉仪测量气缸内表面形状

• 发表时间: 2011
• 作者: 高山潤也;Ko Sang-Il;大山真司;森松孝文
• 通讯作者: 森松孝文

Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer

利用斜入射双波长干涉仪测量动压轴承内表面轮廓

• 发表时间: 2009
• 作者: Dinh Trong Quang;Keiji Goto;Toru Kawano;Toyohiko Ishihara;Osami Sasaki
• 通讯作者: Osami Sasaki

Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer, Optics+Photonics 2009

通过斜入射和双波长干涉仪测量动压轴承的内表面轮廓，Optics Photonics 2009

• 发表时间: 2009
• 作者: O. Sasaki;R. Yamamura;K. Yokoyama;and T. Suzuki
• 通讯作者: and T. Suzuki